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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 4, 2010, Pages 510-514

Surface analysis of polyimide bombarded by charged water droplets

(3) Hiraoka, Kenzo a Sakai, Yuji a Iijima, Yoshitoki b

a UNIVERSITY OF YAMANASHI (Japan)

b JEOL LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSPRAY DROPLETS; ELECTROSPRAYS; IN-VACUUM; ION IMPACT; SURFACE ETCHING; WATER DROPLETS; XPS SPECTRA;

DROP FORMATION; ETCHING; ION BOMBARDMENT; OXYGEN; POLYIMIDES; SURFACE ANALYSIS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 77954186424 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3420465 Document Type: Conference Paper

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.