Molecular-level etching by electrospray droplet impact

Surface and Interface Analysis

Volumn 40, Issue 13, 2008, Pages 1716-1718

  Sakai, Yuji ^a   Iijima, Yoshitoki ^b   Mori, Kunihiko ^a   Hiraoka, Kenzo ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b JEOL LTD   (Japan)

Author keywords

Cluster ion; Electrospray droplet impact; Surface etching

Indexed keywords

ATOMIC PHYSICS; DROP FORMATION; DROPS; ELECTROSPRAY IONIZATION; ETCHING; IONIZATION OF LIQUIDS; IONS; SECONDARY ION MASS SPECTROMETRY;

CLUSTER ION; ELECTROSPRAY DROPLET IMPACT; MOLECULAR LEVELS; PHYSICAL SPUTTERING; SURFACE ETCHING; WATER DROPLETS;

IMPACT IONIZATION;

EID: 58449124732     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2946     Document Type: Article

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