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Volumn 13, Issue 10, 2011, Pages 5473-5484

Thermal processing and native oxidation of silicon nanoparticles

Author keywords

Ambient oxidation; Deuterium; Native oxidation; Silicon nanoparticle; Synthesis; Thermal desorption

Indexed keywords

ADSORBED HYDROGEN; AMBIENT OXIDATION; CARRIER GAS; FTIR; HIGH PROCESSING TEMPERATURES; HYDROGEN CONTENTS; INITIAL OXIDATION; NATIVE OXIDATION; OXIDE LAYER; RF PLASMA; SILICON NANOPARTICLE; SILICON NANOPARTICLES; SURFACE HYDRIDES; SURFACE HYDROGEN;

EID: 80955158571     PISSN: 13880764     EISSN: 1572896X     Source Type: Journal    
DOI: 10.1007/s11051-011-0535-4     Document Type: Article
Times cited : (19)

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