Engineering polymer core-silica shell size in the composite abrasives for CMP applications

Electrochemical and Solid-State Letters

Volumn 11, Issue 10, 2008, Pages

  Armini, S ^a,b   Whelan, C M ^a   Maex, K ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN SIZE AND SHAPE; MECHANISMS; NANOTECHNOLOGY; PARTICLE SIZE; POLYMERS; SHELLS (STRUCTURES); SILICATE MINERALS; SILICON COMPOUNDS; TECHNOLOGY;

ACTIVE SILICA; CHEMICAL-MECHANICAL-PLANARIZATION; COLLOIDAL SILICA; COMPOSITE ABRASIVES; COMPOSITE POLYMERS; INDENTATION DEPTHS; LARGE-CORE; REMOVAL RATE; SILICA PARTICLES; SILICA SHELLS; SINGLE PARTICLES; WAFER SURFACES;

SILICA;

EID: 49749134371     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2953227     Document Type: Article

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