AlGaN-on-Si-Based 10m pixel-to-pixel pitch hybrid imagers for the EUV range

IEEE Electron Device Letters

Volumn 32, Issue 11, 2011, Pages 1561-1563

  Malinowski, Pawel E ^a   Duboz, Jean Yves ^b   De Moor, Piet ^a   John, Joachim ^a   Minoglou, Kyriaki ^a   Srivastava, Puneet ^a   Semond, Fabrice ^b   Frayssinet, Eric ^b   Giordanengo, Boris ^c   Benmoussa, Ali ^c   Kroth, Udo ^d   Gottwald, Alexander ^d   Laubis, Christian ^d   Mertens, Robert ^a   Van Hoof, Chris ^a  

^a IMEC   (Belgium)

^b CRHEA CNRS   (France)

^c ROYAL OBSERVATORY OF BELGIUM   (Belgium)

^d PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Aluminum gallium nitride (AlGaN); Backside illumination; Extreme ultraviolet (EUV); Flip chip; High resolution; Hybrid imager; Ultraviolet imaging

Indexed keywords

ALGAN; BACKSIDE ILLUMINATION; EXTREME ULTRAVIOLETS; FLIP CHIP; HIGH RESOLUTION; HYBRID IMAGER; ULTRAVIOLET IMAGING;

ALUMINUM; ALUMINUM GALLIUM NITRIDE; GALLIUM NITRIDE; PROTON IRRADIATION; SPACE APPLICATIONS; SYNCHROTRON RADIATION;

PIXELS;

EID: 80054966001     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2163615     Document Type: Article

References (16)

1. P. Lemaire, K. Wilhelm, U. Schuehle, W. Curdt, A. I. Poland, S. D. Jordan, R. J. Thomas, D. M. Hassler, and J.-C. Vial, "High resolution solar ultraviolet measurements," Adv. Space Res., vol. 20, no. 12, pp. 2249-2258, 1997.
2. M. Razeghi, "Short-wavelength solar-blind detectors-status, prospects, and markets," Proc. IEEE, vol. 90, no. 6, pp. 1006-1014, Jun. 2002. (Pubitemid 43779257)
3. E. Monroy, F. Omnes, and F. Calle, "Wide-bandgap semiconductor ultraviolet photodetectors," Semicond. Sci. Technol., vol. 18, no. 14, pp. R33-R51, 2003.
4. J. L. Pau, C. Rivera, J. Pereiro, E. Munoz, E. Calleja, U. Schuehle, E. Frayssinet, B. Beaumont, J. Faurie, and P. Gibart, "Nitridebased photodetectors: From visible to X-ray monitoring," Superlattices Microstruct., vol. 36, no. 4-6, pp. 807-814, Oct.-Dec. 2004.
5. S. Aslam, R. E. Vest, D. Franz, F. Yan, Y. Zhao, and B. Mott, "External quantum efficiency of Pt/n-GaN Schottky diodes in the spectral range 5-500nm," Nucl. Instrum. Methods Phys. Res. A, Accel. Spectrom. Detect. Assoc. Equip., vol. 539, no. 1/2, pp. 84-92, Feb. 2005. (Pubitemid 40212094)
6. J. Grant, R. Bates, W. Cunningham, A. Blue, J. Melone, F. Mcewan, J. Vaitkus, E. Gaubas, and V. Oshea, "GaN as a radiation hard particle detector," Nucl. Instrum. Methods Phys. Res. A, Accel. Spectrom. Detect. Assoc. Equip., vol. 576, no. 1, pp. 60-65, Jun. 2007. (Pubitemid 46719450)
7. F. Barkusky, C. Peth, A. Bayer, K. Mann, J. John, and P. E. Malinowski, "Radiation damage resistance of AlGaN detectors for applications in the extreme-ultraviolet spectral range," Rev. Sci. Instrum., vol. 80, no. 9, pp. 093 102, Sep. 2009.
8. R. McClintock, K. Mayes, A. Yasan, D. Shiell, pp. Kung, and M. Razeghi, "320 × 256 solar-blind focal plane arrays based on AlxGa1x]N," Appl. Phys. Lett., vol. 86, no. 1, pp. 11 171-11 173, Jan. 2005.
9. M. B. Reine, A. Hairston, pp. Lamarre, K. K. Wong, S. P. Tobin, A. K. Sood, and C. Cooke, "Solar-blind AlGaN 256 × 256 p-i-n detectors and focal plane arrays," Proc. SPIE, vol. 6119, pp. 611 901-611 915, 2006.
10. Y. Ngu, M. C. Peckerar, D. Sander, C. R. Eddy, M. A. Mastro, J. K. Hite, R. T. Holm, R. L. Henry, and A. Tuchman, "Array of two UV-wavelength detector types," IEEE Trans. Electron Devices, vol. 57, no. 6, pp. 1224-1229, Jun. 2010.
11. J.-L. Reverchon, S. Bansropun, J.-P. Truffer, E. Costard, E. Frayssinet, J. Brault, J.-Y. Duboz, A. Giuliani, and M. Idir, "Performances of AlGaNbased focal plane arrays from 10nm to 200nm," Proc. SPIE, vol. 7691, pp. 769 109-769 109-8, May. 2010.
12. P. E. Malinowski, J. Y. Duboz, pp. D. Moor, J. John, K. Minoglou, Y. Creten, T. Torfs, J. Putzeys, F. Semond, E. Frayssinet, A. Benmoussa, J. F. Hochedez, R. Mertens, and C. V. Hoof, "10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection," in IEDM Tech. Dig., 2010, pp. 348-351.
13. P. E. Malinowski, J.-Y. Duboz, pp. De Moor, K. Minoglou, J. John, S. M. Horcajo, F. Semond, E. Frayssinet, pp. Verhoeve, M. Esposito, B. Giordanengo, A. Benmoussa, R. Mertens, and C. Van Hoof, "Extreme ultraviolet detection using AlGaN-on-Si inverted Schottky photodiodes," Appl. Phys. Lett., vol. 98, no. 14, pp. 141 104, Apr. 2011.
14. P. E. Malinowski, J. John, J.-Y. Duboz, G. Hellings, A. Lorenz, J. G. Rodriguez Madrid, C. Sturdevant, K. Cheng, M. Leys, J. Derluyn, J. Das, M. Germain, K. Minoglou, pp. De Moor, E. Frayssinet, F. Semond, J.-F. Hochedez, B. Giordanengo, and R. Mertens, "Backside-illuminated GaN-on-Si Schottky photodiodes for UV radiation detection," IEEE Electron Device Lett., vol. 30, no. 12, pp. 1308-1310, Dec. 2009.
15. A. Gottwald, U. Kroth, M. Richter, H. Schöppe, and G. Ulm, "Ultraviolet and vacuum-ultraviolet detector-based radiometry at the Metrology Light Source," Meas. Sci. Technol., vol. 21, no. 12, pp. 125 101, Dec. 2010.
16. National Institute of Standards and Technology database. [Online]. Available: http://www.nist.gov/physlab/data/asd.cfm