10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2010, Pages

  Malinowski, Pawel E ^a,b   Duboz, Jean Yves ^c   De Moor, Piet ^a   John, Joachim ^a   Minoglou, Kyriaki ^a   Srivastava, Puneet ^a,b   Creten, Ybe ^a   Torfs, Tom ^a   Putzeys, Jan ^a   Semond, Fabrice ^c   Frayssinet, Eric ^c   Giordanengo, Boris ^d   BenMoussa, Ali ^d   Hochedez, Jean Francois ^d   Mertens, Robert ^a,b   Van Hoof, Chris ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c CRHEA CNRS   (France)

^d ROYAL OBSERVATORY OF BELGIUM   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE LAYER; AL-CONCENTRATION; ALGAN; BACKSIDE-ILLUMINATED; DEEP UV; EUV RADIATION; EXTREME ULTRAVIOLETS; EXTREME UV; IMAGERS; MEASUREMENT RESULTS; PIXEL PITCH; RADIATION HARDNESS; SI-BASED; SOLAR BLIND;

ELECTRON DEVICES; SILICON; SYNCHROTRON RADIATION;

PIXELS;

EID: 79951834995     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2010.5703362     Document Type: Conference Paper

References (4)

1. F. Barkusky, C. Peth, A. Bayer, K. Mann, J. John and P.E. Malinowski, "Radiation damage resistance of AlGaN detectors for applications in the extreme-ultraviolet spectral range", Rev. Sci. Instrum. 80, 093102, 2009.
2. M. Razeghi, "Short-wavelength solar-blind detectors-status, prospects, and markets", Proc. IEEE, Vol. 90, No. 6, 2002.
3. J.-L. Reverchon, S. Bansropun, J. A. Robo, J.P. Truffer, E. Costard, E. Frayssinet, J. Brault, F. Semond, J.Y. Duboz, and M. Idir, "First demonstration and performance of AlGaN based focal plane array for deep-UV imaging", Proc. SPIE, Vol. 7474, 74741G, 2009.
4. P.E. Malinowski, J. John, J.Y. Duboz, G. Hellings, A. Lorenz, J.G. Rodriguez Madrid, C. Sturdevant, K. Cheng, M. Leys, J. Derluyn, J. Das, M. Germain, K. Minoglou, P. De Moor, E. Frayssinet, F. Semond, J.-F. Hochedez, B. Giordanengo, and R. Mertens, "Backside-Illuminated GaN-on-Si Schottky Photodiodes for UV Radiation Detection", IEEE Electr. Device L., 30(12), 1308, 2009.