Performances of AlGaN based focal plane arrays from 10nm to 200nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7691, Issue , 2010, Pages

  Reverchon, J L ^a   Bansropun, S ^a   Truffer, J P ^a   Costard, E ^a   Frayssinet, E ^b   Brault, J ^b   Duboz, J Y ^b   Giuliani, A ^c   Idir, M ^c  

^a ALCATEL THALES III V LAB   (France)

^b CRHEA CNRS   (France)

^c SYNCHROTRON SOLEIL   (France)

Author keywords

AlGaN; Camera; Deep UV; Detector; Vacuum UV

Indexed keywords

ALGAN; CONTACT LAYERS; DEEP UV; DRY ETCHING PROCESS; FLIP CHIP; MEMBRANE INTEGRITY; READ-OUT CIRCUIT; READOUT NOISE; ROOM TEMPERATURE; SAPPHIRE SUBSTRATES; SCHOTTKY PHOTODIODES; SILICON SUBSTRATES; SOLAR OBSERVATIONS; SPECTRAL RESPONSIVITY; SPECTRAL SELECTIVITY; STRONG INTERACTION; ULTRA VIOLET DETECTION; VACUUM UV;

CAMERAS; CHIP SCALE PACKAGES; DETECTORS; DRY ETCHING; FOCAL PLANE ARRAYS; HONEYCOMB STRUCTURES; NITRIDES; PHOTODIODES; PLASMA ETCHING; READOUT SYSTEMS; SILICON ALLOYS; SUPPLY CHAINS; VACUUM; VACUUM APPLICATIONS;

FOCUSING;

EID: 77953767829     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.853947     Document Type: Conference Paper

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