Parallel lattice filters utilizing aluminum nitride contour mode resonators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 65-69

  Wojciechowski, K E ^a   Olsson, R H ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACTUATORS; ALUMINUM NITRIDE; BANDWIDTH; III-V SEMICONDUCTORS; MICROSYSTEMS; RESONATORS; SOLID-STATE SENSORS; WAVE FILTERS;

ALUMINUM NITRIDE CONTOUR-MODE RESONATORS; FILTER TOPOLOGY; HIGH IMPEDANCE; LATTICE FILTERS; LOW INSERTION LOSS; MICRO RESONATORS; PIEZOELECTRIC COUPLINGS;

ELECTRIC NETWORK TOPOLOGY;

EID: 80054074090     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.17     Document Type: Conference Paper

References (5)

1. M. U. Demirci, C. T.-C. Nguyen, “Single-resonator fourth-order micromechanical disk filters,” 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005, pp. 207-210, 2005.
2. TriQuint data sheet for 479.5 MHz SAW filter, Part # 855271,www.triquint.com.
3. R. H. Olsson III, K. E. Wojciechowski, M. R. Tuck, J. E. Stevens and C. D. Nordquist, “Multi-Frequency Aluminum Nitride Micro-Filters for Advanced RF Communications,” Government Microcircuit Applications and Critical Technology Conference, March 2010, In-Press.
4. A. I. Zverev, Handbook of Filter Synthesis, John Wiley & Sons, New York, 1967.
5. G. Piazza, “Piezoelectric Aluminum Nitride Vibrating RF MEMS for Radio Front-End Technology”, P.h.D. Thesis, Department of Electrical Engineering and Computer Science, University of California, Berkeley, 2005, p 69.