SCOPUS 정보 검색 플랫폼

Volumn 27, Issue 3, 2006, Pages 896-905

Thermal conductivity of AlN and SiC thin films

Author keywords

3 method; Aluminum nitride; Silicon carbide; Thermal conductivity; Thickness; Thin film

Indexed keywords

ALUMINUM NITRIDE; MICROSTRUCTURE; SILICON CARBIDE; THERMAL CONDUCTIVITY; THICKNESS MEASUREMENT; X RAY DIFFRACTION;

3Ω METHOD; DEPOSITION TEMPERATURE; SILICON SUBSTRATES;

THIN FILMS;

EID: 33750042571 PISSN: 0195928X EISSN: None Source Type: Journal
DOI: 10.1007/s10765-006-0062-1 Document Type: Article

Times cited : (107)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.