Super high frequency width extensional aluminum nitride (AlN) MEMS resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2009, Pages 1179-1182

  Wojciechowski, K E ^a   Olsson III, R H ^a   Nordquist, C D ^a   Tuck, M R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Aluminum nitride; Microresonator; RF MEMS; SHF MEMS

Indexed keywords

ALUMINUM NITRIDE; III-V SEMICONDUCTORS; MICROELECTROMECHANICAL DEVICES; NITRIDES; PHOTOLITHOGRAPHY;

ALN RESONATORS; ALUMINUM NITRIDE (ALN); CONTOUR-MODE RESONATORS; HIGH FREQUENCY HF; MEMS RESONATORS; MICRO RESONATORS; RF-MEMS;

RESONATORS;

EID: 77952828356     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2009.5441802     Document Type: Conference Paper

References (5)

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