Fabrication, characterization and application of a microelectromechanical system (MEMS) thermopile for non-dispersive infrared gas sensors

Measurement Science and Technology

Volumn 22, Issue 11, 2011, Pages

  Yoo, K P ^a   Hong, H P ^a   Lee, M J ^a   Min, S J ^b   Park, C W ^c   Choi, W S ^a,d   Min, N K ^a  

^a Korea University   (South Korea)

^b LG Display Co Ltd   (South Korea)

^c Kangwon National University   (South Korea)

^d R and D Center   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AIR QUALITY; CHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; ENERGY CONSERVATION; FABRICATION; GAS DETECTORS; INCANDESCENT LAMPS; INTELLIGENT BUILDINGS; MEMS; SILICON NITRIDE;

AIR QUALITY MONITORING; AUTOMOTIVE APPLICATIONS; ENERGY-SAVING BUILDINGS; ENTRANCE APERTURES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMACHINED SILICON; MULTI-LAYER ABSORBERS; NON-DISPERSIVE INFRARED;

THERMOPILES;

EID: 80054734425     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/11/115206     Document Type: Article

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