Ultrafast laser micromachining and patterning of thermal spray multilayers for thermopile fabrication

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 506-513

  Chen, Q ^a   Longtin, J P ^a   Tankiewicz, S ^b   Sampath, S ^b   Gambino, R J ^b  

^a Stony Brook University   (United States)

^b STONY BROOK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOADS; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; LASER APPLICATIONS; LASER PULSES; MULTILAYERS; NICKEL COMPOUNDS; RAPID PROTOTYPING; SPRAYING; THERMOPILES;

BULK MATERIALS; LASER MICROMACHINING; SEEBECK COEFFICIENTS; THERMAL SPRAYING;

MICROMACHINING;

EID: 2342503925     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/010     Document Type: Article

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