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Volumn 516, Issue 11, 2008, Pages 3586-3589

Fabrication of thin-film thermopile micro-bridge with XeF2 etching process

Author keywords

Front side etching; Micro bridge; Thermocouple; Thermopile; XeF2 etching

Indexed keywords

ALUMINUM; ETCHING; THERMOCOUPLES;

EID: 40649092827     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.112     Document Type: Article
Times cited : (17)

References (11)
  • 2
    • 84964521166 scopus 로고    scopus 로고
    • Xu Z., Xiong B., and Wang Y. 6th International Conference on Solid-State and Integrated-Circuit Tech. 2001, 22-25 Oct. 2001. Proceedings vol. 2 (2001) 797
    • (2001) Proceedings , vol.2 , pp. 797
    • Xu, Z.1    Xiong, B.2    Wang, Y.3
  • 3
    • 33745711864 scopus 로고    scopus 로고
    • Rubio R., Santander J., Sabate N., Fonseca L., Gricia I., Cané C., Moreno M., and Marco S. (Eds)
    • In: Rubio R., Santander J., Sabate N., Fonseca L., Gricia I., Cané C., Moreno M., and Marco S. (Eds). Spanish Conference on Electron Devices, 2-4 Feb. 2005 (2005) 503
    • (2005) Spanish Conference on Electron Devices, 2-4 Feb. 2005 , pp. 503


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.