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Volumn 516, Issue 11, 2008, Pages 3586-3589
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Fabrication of thin-film thermopile micro-bridge with XeF2 etching process
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Author keywords
Front side etching; Micro bridge; Thermocouple; Thermopile; XeF2 etching
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Indexed keywords
ALUMINUM;
ETCHING;
THERMOCOUPLES;
FRONT-SIDE ETCHING;
MICRO-BRIDGES;
THIN FILMS;
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EID: 40649092827
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2007.08.112 Document Type: Article |
Times cited : (17)
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References (11)
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