CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 μm atmospheric window

Sensors and Actuators, B: Chemical

Volumn 125, Issue 1, 2007, Pages 214-223

  Roncaglia, A ^a   Mancarella, F ^a   Cardinali, G C ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

3 5 m Wavelength range; CMOS; Thermopile

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; INFRARED ABSORPTION; POLYSILICON; WAVELENGTH;

ABSORPTION LINES; DIELECTRIC SPACER; PASSIVATION LAYERS;

THERMOPILES;

EID: 34347340387     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.02.018     Document Type: Article

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