Integrated surface-micromachined mass flow controller

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 20-23

  Xie, Jun ^a   Shih, Jason ^a   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLABILITY; ELECTROSTATIC DEVICES; FLOW CONTROL; MICROMACHINING; MICROPROCESSOR CHIPS; MICROSENSORS; PRINTED CIRCUIT BOARDS; PULSE WIDTH MODULATION; SENSITIVITY ANALYSIS;

ACTUATION VOLTAGE ADJUSTMENT; INTEGRATED SURFACE MICROMACHINE MASS FLOW CONTROLLED; MICROVALVE; PARYLENE; THERMAL FLOW SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037480758     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. G.T.A. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill 1998
2. J. Xie, X. Yang, X.Q. Wang and Y.C. Tai, "Surface Micromachined Leakage Proof Parylene Check Valve", The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01), Interlaken, Switzerland, 2001, pp.539-542.
3. P. Dubois, B. Guldimann, M.A. Gretillat, N.F. de Rooij, "Electrostatically Actuated Gas Microvalve Based on a Ta-Si-N Membrane", The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01), Interlaken, Switzerland, 2001, pp.535-538.
4. W. van der Wijngaart, H. Ask, P. Enoksson, G. Stemme, "A High-Stroke, High-Pressure Electrostatic Actuator for Valve Applications", Sensors and Actuators A, 100 (2002), pp.264-271
5. T.-J. Yao, K. Walsh and Y.-C. Tai, "Dielectric Charging Effects on Parylene Electrostatic Actuators", The 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS'02), Las Vegas, USA, 2002, pp.614-617
6. S. Wu, Q. Lin, Y. Yuen and Y.-C. Tai, "MEMS flow sensors for nano-fluidic applications," Sensors and Actuators A: Physical, 89 (1-2) (2001) pp. 152-158