Hybrid-assembled micro dosing system using silicon-based micropump/valve and mass flow sensor

Sensors and Actuators, A: Physical

Volumn 69, Issue 1, 1998, Pages 85-91

  Nguyen, N T ^a,b   Schubert, S ^a   Richter, S ^a   Dotzel W ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Micro dosing system; Silicon mass flow sensor; Silicon micropump

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTROSTATIC DEVICES; FLOW OF WATER; PIEZOELECTRIC DEVICES; PULSE WIDTH MODULATION;

MICRO DOSING SYSTEM; PULSE WIDTH MODULATED CONTROL METHOD; SILICON MASS FLOW SENSOR; SILICON MICROPUMP;

SILICON SENSORS;

EID: 0032098540     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00039-9     Document Type: Article

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