An electrostatically latching thermopneumatic microvalve with closed-loop position sensing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 415-418

  Potkay, Joseph A ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY FLOORS; ELECTROSTATIC HOLD; ELECTROSTATICALLY LATCHING THERMOPNEUMATIC MICROVALVES; THERMOPNEUMATIC DRIVES;

CAPACITANCE; ELECTROSTATICS; FEEDBACK; GAS CHROMATOGRAPHY; MICROACTUATORS; PNEUMATIC EQUIPMENT; PRESSURE EFFECTS; SENSORS; VALVES (MECHANICAL); VOLTAGE CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 26844518870     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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