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Volumn 21, Issue 40, 2011, Pages 15889-15894
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A continuous process for Si nanowires with prescribed lengths
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Author keywords
[No Author keywords available]
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Indexed keywords
ANODIC BIAS;
BOTTOM UP METHODS;
CHEMICAL ETCHING;
CONTINUOUS PROCESS;
POROUS SEGMENTS;
SI NANOWIRE;
SILICON SUBSTRATES;
SINGLE CRYSTALLINE SILICON;
TOP-DOWN APPROACH;
ULTRASONIC TREATMENTS;
POROUS SILICON;
NANOWIRES;
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EID: 80053546644
PISSN: 09599428
EISSN: 13645501
Source Type: Journal
DOI: 10.1039/c1jm13831f Document Type: Article |
Times cited : (27)
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References (24)
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