Gallium nitride nanowire electromechanical resonators with piezoresistive readout

Journal of Vacuum Science and Technology B

Volumn 29, Issue 5, 2011, Pages

  Gray, Jason M ^a   Rogers, Charles T ^a   Bertness, Kris A ^b   Sanford, Norman A ^b  

^a UNIVERSITY OF COLORADO   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTROPHORESIS; FREQUENCY RESPONSE; GALLIUM NITRIDE; III-V SEMICONDUCTORS; NANOWIRES; NITRIDES; RESONATORS;

ELECTROMECHANICAL RESONATORS; ELECTROSTATIC GATES; GALLIUM NITRIDE NANOWIRES; LITHOGRAPHIC PATTERNING; MECHANICAL DISSIPATION; MECHANICAL QUALITY FACTORS; NATURALLY OCCURRING; PIEZORESISTIVE READ-OUT;

ELECTROMECHANICAL DEVICES;

EID: 80053541618     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3622326     Document Type: Article

References (21)

1. K. L. Ekinci, Y. T. Yang, and M. L. Roukes, J. Appl. Phys. 95, 2682 (2004). 10.1063/1.1642738
2. C. A. Regal, J. D. Teufel, and K. W. Lehnert, Nat. Phys. 4, 555 (2008). 10.1038/nphys974
3. R. Zhu, D. Wang, S. Xiang, Z. Zhou, and X. Ye, Nanotechnology 19, 285712 (2008). 10.1088/0957-4484/19/28/285712 (Pubitemid 351813763)
4. X. L. Feng, R. He, P. Yang, and M. L. Roukes, Nano Lett. 7, 1953 (2007). 10.1021/nl0706695 (Pubitemid 47197573)
5. M. Belov, N. J. Quitoriano, S. Sharma, W. K. Hiebert, T. I. Kamins, and S. Evoy, J. Appl. Phys. 103, 074304 (2008). 10.1063/1.2891002 (Pubitemid 351538043)
6. J. M. Nichol, E. R. Hemesath, L. J. Lauhon, and R. Budakian, Appl. Phys. Lett. 95, 123116 (2009). 10.1063/1.3232232
7. S. Perisanu, P. Vincent, A. Ayari, M. Choueib, S. T. Purcell, M. Bechelany, and D. Cornu, Appl. Phys. Lett. 90, 043113 (2007). 10.1063/1.2432257 (Pubitemid 46184687)
8. X. L. Feng, C. J. White, A. Hajimiri, and M. L. Roukes, Nat. Nanotechnol. 3, 342 (2008). 10.1038/nnano.2008.125 (Pubitemid 351809608)
9. S. M. Tanner, J. M. Gray, C. T. Rogers, K. A. Bertness, and N. A. Sanford, Appl. Phys. Lett. 91, 203117 (2007). 10.1063/1.2815747 (Pubitemid 350128950)
10. K. A. Bertness, A. Roshko, L. M. Mansfield, T. E. Harvey, and N. A. Sanford, J. Cryst. Growth 310, 3154 (2008). 10.1016/j.jcrysgro.2008.03.033
11. P. A. Smith, C. D. Nordquist, T. N. Jackson, T. S. Mayer, B. R. Martin, J. Mbindyo, and T. E. Mallouk, Appl. Phys. Lett. 77, 1399 (2000). 10.1063/1.1290272
12. Y. Liu, J. H. Chung, W. K. Liu, and R. S. Ruoff, J. Phys. Chem. B 110, 14098 (2006). 10.1021/jp061367e (Pubitemid 44187966)
13. A. D. Bykhovski, V. V. Kaminski, M. S. Shur, Q. C. Chen, and M. A. Khan, Appl. Phys. Lett. 68, 818 (1996). 10.1063/1.116543 (Pubitemid 126688532)
14. M. Li, H. X. Tang, and M. L. Roukes, Nat. Nanotechnol. 2, 114 (2007). 10.1038/nnano.2006.208 (Pubitemid 46226371)
15. X. Wang, J. Zhou, J. Song, J. Liu, N. Xu, and Z. L. Wang, Nano Lett. 6, 2768 (2006). 10.1021/nl061802g (Pubitemid 46129569)
16. J. B. Hagen, Radio Frequency Electronics (Cambridge University Press, Cambridge, UK, 1996), pp. 10-13.
17. R. Nowak, M. Pessa, M. Suganuma, M. Leszczynski, I. Grzegory, S. Porowski, and F. Yoshida, Appl. Phys. Lett. 75, 2070 (1999). 10.1063/1.124919
18. A. N. Cleland, Foundations of Nanomechanics (Springer, Berlin, 2003).
19. U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004). 10.1103/PhysRevB.69.045403
20. Z. Wang, X. Zu, L. Yang, F. Gao, and W. J. Weber, Phys. Rev. B 76, 045310 (2007). 10.1103/PhysRevB.76.045310
21. A. K. Huttel, G. A. Steele, B. Witkamp, M. Poot, L. P. Kouwenhoven, and H.S.J. van der Zant, Nano Lett. 9, 2547 (2009). 10.1021/nl900612h