Modifying surface properties of diamond-like carbon films via nanotexturing

Journal of Physics D: Applied Physics

Volumn 44, Issue 39, 2011, Pages

  Corbella, C ^a   Portal Marco, S ^a   Rubio Roy, M ^a   Bertran, E ^a   Oncins, G ^a   Vallve M A ^a   Ignes Mullol J ^a   Andjar, J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOUR DEPOSITION; COLLOIDAL LITHOGRAPHY; CONTACT AREAS; DIAMOND-LIKE; DIFFERENT SCALE; DIRECTIONAL DEPENDENCE; DLC THIN FILMS; FABRICATION TECHNIQUE; FRICTION COEFFICIENTS; IN-PLANE ANISOTROPY; INCIDENCE ANGLES; ION BEAM ETCHING; LANGMUIR BLODGETT TECHNIQUES; LATERAL FORCE MICROSCOPES; NANO PATTERN; NANOTEXTURED; NANOTEXTURING; NANOTRIBOMETER; PATTERNED SURFACE; PULSED DC; TRIBOLOGICAL COATINGS; TRIBOLOGICAL PROPERTIES; WATER CONTACT ANGLE;

AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; ANISOTROPY; ARGON; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CONTACT ANGLE; DEPOSITION; DIAMOND LIKE CARBON FILMS; ETCHING; FRICTION; HARD COATINGS; LITHOGRAPHY; MEMS; MICROELECTROMECHANICAL DEVICES; MONOCRYSTALLINE SILICON; PHOTONIC CRYSTALS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLED MONOLAYERS; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON WAFERS; SUBSTRATES; SURFACE PROPERTIES; THIN FILM TRANSISTORS; TRIBOLOGY;

CARBON FILMS;

EID: 80052926839     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/39/395301     Document Type: Article

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