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Volumn 19, Issue 7-9, 2010, Pages 1124-1130
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Surface structuring of diamond-like carbon films by colloidal lithography with silica sub-micron particles
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Author keywords
Coatings; Colloidal lithography; Diamond like carbon; Ion beam etching; Surface properties
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Indexed keywords
COEFFICIENT OF FRICTIONS;
COLLOIDAL LITHOGRAPHY;
DIAMOND-LIKE;
DIAMOND-LIKE CARBON;
HYDROPHOBIC PROPERTIES;
ION BEAM ETCHING;
MICRO PILLARS;
MONOCRYSTALLINE SILICON;
NANOTRIBOMETER;
PULSED DC;
SPECIAL SURFACES;
SUB-MICRON PARTICLES;
SUBMICRON;
SURFACE STRUCTURING;
THERMAL-ANNEALING;
AMORPHOUS CARBON;
AMORPHOUS FILMS;
ARGON;
BEAM PLASMA INTERACTIONS;
CARBON FILMS;
CHEMICAL VAPOR DEPOSITION;
DIAMONDS;
ETCHING;
ION BEAMS;
ION BOMBARDMENT;
IONS;
LITHOGRAPHY;
MONOLAYERS;
PLASMA DEPOSITION;
PROTECTIVE COATINGS;
SILICA;
SURFACE PROPERTIES;
TRACE ANALYSIS;
DIAMOND LIKE CARBON FILMS;
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EID: 77955230401
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2010.03.020 Document Type: Article |
Times cited : (9)
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References (36)
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