Scanning probe nanoimprint lithography

Nanotechnology

Volumn 21, Issue 7, 2010, Pages

  Dinelli, F ^a   Menozzi, C ^b,d   Baschieri, P ^a   Facci, P ^b   Pingue, P ^c  

^a CNR   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

^c INFM   (Italy)

^d UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AFM TIP; ANTISTICKING LAYERS; ATOMIC FORCE MICROSCOPES; EXPERIMENTAL SETUP; EXTERNAL LOADS; LATERAL FORCE; NANOSCALE LEVELS; NORMAL LOADS; RELATIVE DISTANCES; SCANNING PROBES; THERMOPLASTIC POLYMER FILMS; TIME INTERVAL;

ATOMIC FORCE MICROSCOPY; INDENTATION; POLYMER FILMS; POLYSTYRENES;

NANOIMPRINT LITHOGRAPHY;

EID: 80052811813     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/7/075305     Document Type: Article

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