메뉴 건너뛰기




Volumn 7, Issue 2, 2007, Pages 357-362

Room temperature mechanical thinning and imprinting of solid films

Author keywords

[No Author keywords available]

Indexed keywords

DIES; DUCTILITY; FORGING; ISOTHERMS; MASS TRANSFER; NANOSTRUCTURED MATERIALS;

EID: 33847721514     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl0624566     Document Type: Article
Times cited : (22)

References (19)
  • 1
    • 0030570065 scopus 로고    scopus 로고
    • Imprint lithography with 25-nanometer resolution
    • Chou, S. Y.; Krauss, P. R.; Renstrom, P. J., Imprint lithography with 25-nanometer resolution Science 1996, 272, 85-87.
    • (1996) Science , vol.272 , pp. 85-87
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 2
    • 0034609801 scopus 로고    scopus 로고
    • Patterning of polymer-supported metal films by microcutting
    • Stutzmann, N.; Tervoort, T. A.; Bastiaansen, K.; Smith, P., Patterning of polymer-supported metal films by microcutting. Nature 2000, 407 (6804), 613-616.
    • (2000) Nature , vol.407 , Issue.6804 , pp. 613-616
    • Stutzmann, N.1    Tervoort, T.A.2    Bastiaansen, K.3    Smith, P.4
  • 3
    • 0035902004 scopus 로고    scopus 로고
    • Room-temperature imprint lithography
    • Khang, D. Y.; Yoon, H.; Lee, H. H., Room-temperature imprint lithography. Adv. Mater. 2001, 13 (10), 749-752.
    • (2001) Adv. Mater , vol.13 , Issue.10 , pp. 749-752
    • Khang, D.Y.1    Yoon, H.2    Lee, H.H.3
  • 5
    • 8944257381 scopus 로고    scopus 로고
    • Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters
    • Xia, Y.; Kim, E.; Zhao, X.-M.; Rogers, J. A.; Prentiss, M.; Whitesides, G. M., Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters. Science 1996, 273, 347-349.
    • (1996) Science , vol.273 , pp. 347-349
    • Xia, Y.1    Kim, E.2    Zhao, X.-M.3    Rogers, J.A.4    Prentiss, M.5    Whitesides, G.M.6
  • 6
    • 0037459370 scopus 로고    scopus 로고
    • Self-aligned, vertical-channel, polymer field-effect transistors
    • Stutzmann, N.; Friend, R. H.; Sirringhaus, H., Self-aligned, vertical-channel, polymer field-effect transistors. Science 2003, 299 (5614), 1881-1884.
    • (2003) Science , vol.299 , Issue.5614 , pp. 1881-1884
    • Stutzmann, N.1    Friend, R.H.2    Sirringhaus, H.3
  • 7
    • 2942558559 scopus 로고    scopus 로고
    • Recent progress in nanoimprint technology and its applications
    • Guo, L. J., Recent progress in nanoimprint technology and its applications. J. Phys. D: Appl. Phys. 2004, 37 (11), R123-R141.
    • (2004) J. Phys. D: Appl. Phys , vol.37 , Issue.11
    • Guo, L.J.1
  • 8
    • 17044413748 scopus 로고    scopus 로고
    • Influence of elastic strains on the mask ratio in glassy polymer nanoimprint
    • Cross, G. L. W.; O'Connell, B. S.; Pethica, J. B., Influence of elastic strains on the mask ratio in glassy polymer nanoimprint. Appl. Phys. Lett. 2005, 86 (8), 081902.
    • (2005) Appl. Phys. Lett , vol.86 , Issue.8 , pp. 081902
    • Cross, G.L.W.1    O'Connell, B.S.2    Pethica, J.B.3
  • 9
    • 85040875608 scopus 로고
    • Cambridge University Press: Cambridge
    • Johnson, K. L. Contact mechanics. Cambridge University Press: Cambridge, 1985.
    • (1985) Contact mechanics
    • Johnson, K.L.1
  • 10
    • 33749434497 scopus 로고    scopus 로고
    • The production of nanostructures by mechanical forming
    • Cross, G. L. W., The production of nanostructures by mechanical forming. J. Phys. D: Appl. Phys. 2006, 39, R363-R386.
    • (2006) J. Phys. D: Appl. Phys , vol.39
    • Cross, G.L.W.1
  • 12
    • 0942300052 scopus 로고    scopus 로고
    • Defect analysis in thermal nanoimprint lithography
    • Hirai, Y.; Yoshida, S.; Takagi, N., Defect analysis in thermal nanoimprint lithography. J. Vac. Sci. Technol., B 2003, 21 (6), 2765-2770.
    • (2003) J. Vac. Sci. Technol., B , vol.21 , Issue.6 , pp. 2765-2770
    • Hirai, Y.1    Yoshida, S.2    Takagi, N.3
  • 13
  • 16
    • 0016823748 scopus 로고
    • Review of the application of ultrasonic vibrations to deforming metals
    • Eaves, A. E.; Smith, A. W.; Waterhouse, W. J.; Sansome, D. H., Review of the application of ultrasonic vibrations to deforming metals. Ultrasonics 1975, 162.
    • (1975) Ultrasonics , pp. 162
    • Eaves, A.E.1    Smith, A.W.2    Waterhouse, W.J.3    Sansome, D.H.4
  • 17
    • 16144369397 scopus 로고    scopus 로고
    • Basic conditions for material and structural ratcheting
    • Hübel, H., Basic conditions for material and structural ratcheting. Nucl. Eng. Des. 1996, 162, 55-65.
    • (1996) Nucl. Eng. Des , vol.162 , pp. 55-65
    • Hübel, H.1
  • 18
    • 0142090041 scopus 로고    scopus 로고
    • Pattern uniformity control in room-temperature imprint lithography
    • Hong, P. S.; Lee, H. H., Pattern uniformity control in room-temperature imprint lithography. Appl. Phys. Lett. 2003, 83 (12), 2441-2443.
    • (2003) Appl. Phys. Lett , vol.83 , Issue.12 , pp. 2441-2443
    • Hong, P.S.1    Lee, H.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.