메뉴 건너뛰기




Volumn 21, Issue 6, 2011, Pages 1087-1097

Noise characterization in millimeter sized micromanipulation systems

Author keywords

Characterization of noise sources; Environmental noise; Finite difference modeling; Micromanipulation systems; Nanometer vibrations

Indexed keywords

ACTIVE NOISE CONTROL; DYNAMIC MODELS; END EFFECTORS; FINITE DIFFERENCE METHOD; INTERFEROMETERS; LASER INTERFEROMETRY; MICROMANIPULATORS; MICROMETERS; NANOCANTILEVERS;

EID: 80052767841     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2011.06.005     Document Type: Article
Times cited : (19)

References (34)
  • 1
    • 80052759146 scopus 로고    scopus 로고
    • Development of a compliant-based microgripper for microassembly
    • Beijing, China
    • Zubir MNM, Shirinzadeh B. Development of a compliant-based microgripper for microassembly. In: IEEE MESA, Beijing, China; 2008.
    • (2008) IEEE MESA
    • Mnm, Z.1    Shirinzadeh, B.2
  • 2
    • 34247629155 scopus 로고    scopus 로고
    • Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling
    • D.T. Chu, J.F. Creemer, and P.M. Sarro Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling J Micromech Microeng 16 6 2006 102 106
    • (2006) J Micromech Microeng , vol.16 , Issue.6 , pp. 102-106
    • Chu, D.T.1    Creemer, J.F.2    Sarro, P.M.3
  • 4
    • 33947219854 scopus 로고    scopus 로고
    • Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field
    • DOI 10.1109/JMEMS.2006.885853
    • F. Beyeler, A.P. Neild, S. Oberti, D.J. Bell, Y. Sun, and J. Dual Monolithically fabricated micro-gripper with integrated force sensor for manipulating micro-objects and biological cells aligned in an ultrasonic field IEEE/ASME J Microelectromech Syst (JMEMS) 16 1 2006 7 15 (Pubitemid 46431399)
    • (2007) Journal of Microelectromechanical Systems , vol.16 , Issue.1 , pp. 7-15
    • Beyeler, F.1    Neild, A.2    Oberti, S.3    Bell, D.J.4    Sun, Y.5    Dual, J.6    Nelson, B.J.7
  • 5
    • 34548219055 scopus 로고    scopus 로고
    • A millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output
    • L. Xinyu, T. Jianhua, and S. Yu A millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output Smart Mater Struct 16 5 2007 1742 1750
    • (2007) Smart Mater Struct , vol.16 , Issue.5 , pp. 1742-1750
    • Xinyu, L.1    Jianhua, T.2    Yu, S.3
  • 6
    • 67650474408 scopus 로고    scopus 로고
    • Development of a high precision flexure-based microgripper
    • M.N.M. Zubir, and B. Shirinzadeh Development of a high precision flexure-based microgripper Precis Eng 33 4 2009 362 370
    • (2009) Precis Eng , vol.33 , Issue.4 , pp. 362-370
    • Zubir, M.N.M.1    Shirinzadeh, B.2
  • 7
    • 67349220138 scopus 로고    scopus 로고
    • Improvement of strain gauges micro-forces measurement using Kalman optimal filtering
    • Y. Haddab, Q. Chen, and P. Lutz Improvement of strain gauges micro-forces measurement using Kalman optimal filtering Mechatronics 19 4 2009 457 462
    • (2009) Mechatronics , vol.19 , Issue.4 , pp. 457-462
    • Haddab, Y.1    Chen, Q.2    Lutz, P.3
  • 8
    • 68649086417 scopus 로고    scopus 로고
    • Micro gripper for micromanipulation using IPMCs (ionic polymer metal composites)
    • R.K. Jain, U.S. Patkar, and S. Majumdar Micro gripper for micromanipulation using IPMCs (ionic polymer metal composites) J Sci Ind Res 68 2009 23 28
    • (2009) J Sci Ind Res , vol.68 , pp. 23-28
    • Jain, R.K.1    Patkar, U.S.2    Majumdar, S.3
  • 10
    • 77954382510 scopus 로고    scopus 로고
    • Complete open loop control of hysteretic, creeped, and oscillating piezoelectric cantilevers
    • M. Rakotondrabe, C. Clevy, and P. Lutz Complete open loop control of hysteretic, creeped, and oscillating piezoelectric cantilevers IEEE Trans Automat Sci Eng 7 3 2009 440 450
    • (2009) IEEE Trans Automat Sci Eng , vol.7 , Issue.3 , pp. 440-450
    • Rakotondrabe, M.1    Clevy, C.2    Lutz, P.3
  • 12
    • 51649094114 scopus 로고    scopus 로고
    • MicroNewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback
    • Pasadena, CA, USA
    • Kim K, Liu X, Zhang Y, Sun Y. MicroNewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback. In: Proceedings of the IEEE international conference on robotics and automation, Pasadena, CA, USA; 2008.
    • (2008) Proceedings of the IEEE International Conference on Robotics and Automation
    • Kim, K.1    Liu, X.2    Zhang, Y.3    Sun, Y.4
  • 15
    • 70450230372 scopus 로고    scopus 로고
    • Direct measurement of spatial modes of a microcantilever from thermal noise
    • P. Paolino, B. Tiribilli, and L. Bellon Direct measurement of spatial modes of a microcantilever from thermal noise J Appl Phys 106 9 2009 094313-1 094313-5
    • (2009) J Appl Phys , vol.106 , Issue.9 , pp. 0943131-0943135
    • Paolino, P.1    Tiribilli, B.2    Bellon, L.3
  • 16
    • 0031930529 scopus 로고    scopus 로고
    • Thermal noise limitations on micromechanical experiments
    • DOI 10.1007/s002490050113
    • F. Gittes, and C.F. Schmidt Thermal noise limitations on micromechanical experiments Eur Biophys J 27 1998 75 81 (Pubitemid 28105808)
    • (1998) European Biophysics Journal , vol.27 , Issue.1 , pp. 75-81
    • Gittes, F.1    Schmidt, C.F.2
  • 18
    • 5844245761 scopus 로고
    • Environmental isolation platform for microrobot system development
    • C.J.H. Brenan, P.G. Charette, and I.W. Hunter Environmental isolation platform for microrobot system development Rev Sci Instrum 63 6 1992 3492 3498
    • (1992) Rev Sci Instrum , vol.63 , Issue.6 , pp. 3492-3498
    • Brenan, C.J.H.1    Charette, P.G.2    Hunter, I.W.3
  • 19
    • 23244453962 scopus 로고    scopus 로고
    • The systematic design and fabrication of a three-chopstick microgripper
    • DOI 10.1007/s00170-002-1493-x
    • J. Park, and W. Moon The systematic design and fabrication of a three-chopstick microgripper Int J Adv Manuf Technol 26 3 2005 251 261 (Pubitemid 41090520)
    • (2005) International Journal of Advanced Manufacturing Technology , vol.26 , Issue.3 , pp. 251-261
    • Park, J.1    Moon, W.2
  • 21
    • 70349921641 scopus 로고    scopus 로고
    • Robotic micromanipulation for microassembly: Modelling by sequencial function chart and achievement by multiple scale visual servoings
    • B. Tamadazte, N. Lefort-Piat, S. Dembl, and G. Fortier Robotic micromanipulation for microassembly: modelling by sequencial function chart and achievement by multiple scale visual servoings J Micro-Nano-Mechatron 5 2009 1 14
    • (2009) J Micro-Nano-Mechatron , vol.5 , pp. 1-14
    • Tamadazte, B.1    Lefort-Piat, N.2    Dembl, S.3    Fortier, G.4
  • 22
    • 78951478883 scopus 로고    scopus 로고
    • Robotic micromanipulation and microassembly using monoview and multiscale visual servoing
    • B. Tamadazte, N. Lefort-Piat, and S. Dembl Robotic micromanipulation and microassembly using monoview and multiscale visual servoing IEEE/ASME Trans Mechatron 16 2009 277 287
    • (2009) IEEE/ASME Trans Mechatron , vol.16 , pp. 277-287
    • Tamadazte, B.1    Lefort-Piat, N.2    Dembl, S.3
  • 24
    • 58149479449 scopus 로고    scopus 로고
    • Robust control of XYZ flexure-based micromanipulator with large motion
    • X. Tang, and I.M. Chen Robust control of XYZ flexure-based micromanipulator with large motion Front Mech Eng China 4 1 2009 25 34
    • (2009) Front Mech Eng China , vol.4 , Issue.1 , pp. 25-34
    • Tang, X.1    Chen, I.M.2
  • 25
    • 67349263452 scopus 로고    scopus 로고
    • Quadrilateral modelling and robust control of a nonlinear piezoelectric cantilever
    • M. Rakotondrabe, Y. Haddab, and P. Lutz Quadrilateral modelling and robust control of a nonlinear piezoelectric cantilever IEEE Trans Control Syst Technol 17 3 2009 528 539
    • (2009) IEEE Trans Control Syst Technol , vol.17 , Issue.3 , pp. 528-539
    • Rakotondrabe, M.1    Haddab, Y.2    Lutz, P.3
  • 26
    • 7044247956 scopus 로고    scopus 로고
    • Precision force and position control of ionic polymermetal composite
    • N. Bhat, and W.J. Kim Precision force and position control of ionic polymermetal composite J Syst Control Eng 218 6 2004 421 432
    • (2004) J Syst Control Eng , vol.218 , Issue.6 , pp. 421-432
    • Bhat, N.1    Kim, W.J.2
  • 27
    • 34347209835 scopus 로고
    • Calculation of thermal noise in atomic force microscopy
    • H.J. Butt, and M. Jaschke Calculation of thermal noise in atomic force microscopy Nanotechnology 6 1 1995
    • (1995) Nanotechnology , vol.6 , Issue.1
    • Butt, H.J.1    Jaschke, M.2
  • 28
    • 78651482255 scopus 로고    scopus 로고
    • Modelling of a MEMS-based microgripper: Application to dexterous micromanipulation
    • Taipei, Taiwan
    • Boudaoud M, Haddab Y, Le Gorrec Y. Modelling of a MEMS-based microgripper: application to dexterous micromanipulation. In: IEEE/RSJ IROS 2010, Taipei, Taiwan; 2010.
    • (2010) IEEE/RSJ IROS 2010
    • Boudaoud, M.1    Haddab, Y.2    Le Gorrec, Y.3
  • 34
    • 84871691103 scopus 로고
    • Balancing-free square-root algorithm for computing singular perturbation approximations
    • Brighton, UK
    • Varga A. Balancing-free square-root algorithm for computing singular perturbation approximations. In: IEEE CDC, Brighton, UK; 1991.
    • (1991) IEEE CDC
    • Varga, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.