Modal analysis of microgrippers used in assembly of MEMS devices

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 281-286

  Anis, Yasser H ^a   Cleghorn, William L ^a   Mills, James K ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

HARMONIC EXCITATIONS; MICROASSEMBLY; MICROGRIPPERS; RESONATING FORCE SENSORS;

ASSEMBLY; FINITE ELEMENT METHOD; GRIPPERS; MATHEMATICAL MODELS; MICROSENSORS; MICROSTRUCTURE; SEISMOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 33749063191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.74     Document Type: Conference Paper

References (7)

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2. C. Barthod, C. Géhin, "New force sensor based on a double ended tuning fork", in proc. 2000 IEEE/EIA International Frequency Control Symposium and Exhibition, Kansas City, USA, June 2000.
3. D. Koester, A. Cowen, R. Mahadevan, and B. Hardy, "PolyMUMPs design handbook revision 8.0," in MEMSCAP, MEMS Business Unit (CRONOS) Research Triangle Park, NC, 2001.
4. W. N. Sharpe, B. Yuan, R. Vaidyanathan, and R. L. Edwards, "Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon," in Proc. Tenth IEEE InternationalWorkshop on Microelectromechanical Systems, Nagoya, Japan, 1997, pp. 424-429.
5. ANSYS Users Manual, ANSYS Inc. Copyright © 2003 SAS IP, Inc.
6. Z. Fu, J. He, "Modal analysis", Butterworth-Heinemann, 2001
7. William Thomson, "Theory of Vibration, with applications", Chapman and Hall, 1993.