A flexible experimental workcell for efficient and reliable wafer-level 3D microassembly

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 1, Issue , 2001, Pages 133-138

  Yang, G ^a   Gaines, J A ^a   Nelson, B J ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); GRAPHICAL USER INTERFACES; GRIPPERS; IMAGING SYSTEMS; MICROMACHINING; MICROMANIPULATORS; MOTION CONTROL; SILICON WAFERS;

MICROASSEMBLY;

ROBOTIC ASSEMBLY;

EID: 0034873704     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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4. Micro-assembly planning with van der Waals force
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8. Shell-body fabrication for micromachines
9. Design and fabrication of a gripping tool for micromanipulation
10. Vacuum tool for handling microobjects with a nanorobot