Influence of oblique-angle sputtered transparent conducting oxides on performance of Si-based thin film solar cells

Physica Status Solidi (A) Applications and Materials Science

Volumn 208, Issue 9, 2011, Pages 2220-2225

  Leem, Jung Woo ^a   Yu, Jae Su ^a  

^a Kyung Hee University   (South Korea)

Author keywords

oblique angle sputtering; porosity; silicon based solar cells; transparent conducting oxides

Indexed keywords

A-SI:H; AL-DOPED ZINC OXIDE; INCIDENCE ANGLES; INDIUM TIN OXIDE; ITO FILMS; OBLIQUE-ANGLE SPUTTERING; PHYSICAL DATA; SB-DOPED TIN OXIDE; SI-BASED; SILICON-BASED; SILVACO; SIMULATION PARAMETERS; SPUTTERED FILMS; SPUTTERING PROCESS; SPUTTERING TARGET; TANDEM THIN FILM SOLAR CELLS; THIN FILM SOLAR CELLS; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTING OXIDE FILMS;

CONDUCTIVE FILMS; CONVERSION EFFICIENCY; INDIUM COMPOUNDS; OPTICAL PROPERTIES; OXIDE FILMS; SILICON; THIN FILMS; TIN; TIN OXIDES; ZINC OXIDE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 80052447619     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201026644     Document Type: Article

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