Structural, optical, and electrical properties of AZO films by tilted angle sputtering method

Thin Solid Films

Volumn 518, Issue 22, 2010, Pages 6285-6288

  Leem, J W ^a   Yu, J S ^a  

^a Kyung Hee University   (South Korea)

Author keywords

Aluminum doped zinc oxide; Optical and electrical characteristics; RF magnetron sputtering; Structural property; Tilted angle sputtering

Indexed keywords

ALUMINUM-DOPED ZINC OXIDE; AZO FILMS; ELECTRICAL CHARACTERISTIC; ELECTRICAL PROPERTY; EXTINCTION COEFFICIENTS; GLASS SUBSTRATES; NANO-COLUMNS; OPTICAL TRANSMITTANCE; RF-MAGNETRON SPUTTERING; SI SUBSTRATES; SPUTTERING METHODS; SPUTTERING PROCESS; SUBSTRATE HOLDERS; SUBSTRATE ROTATION; TILTED ANGLE; VISIBLE-WAVELENGTH RANGE;

ALUMINUM; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OXIDE FILMS; REFRACTIVE INDEX; STRUCTURAL PROPERTIES; SUBSTRATES; ZINC; ZINC OXIDE;

OPTICAL FILMS;

EID: 77956059819     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.02.075     Document Type: Conference Paper

References (18)

1. W. Beyer, J. Hüpkes, and H. Stiebig Thin Solid Films 502 2005 311
2. H.T. Cao, C. Sun, Z.L. Pei, A.Y. Wang, L.S. Wen, R.J. Hong, and X. Jiang J. Mater. Sci. 15 2004 169
3. O. Kluth, G. Schöpe, B. Rech, R. Menner, M. Oertel, K. Orgassa, and H.W. Schock Thin Solid Films 502 2005 311
4. J. Mass, P. Bhattacharya, and R.S. Katiyar Mater. Sci. Eng. B 103 2003 9
5. Y. Kashiwaba, F. Katahira, K. Haga, T. Sekiguchi, and H. Watanabe J. Cryst. Growth 221 2000 431
6. A.L. Armelao, F.M. Fabrizio, G.S. Gialanella, and Z.F. Zordan Thin Solid Films 394 2001 90
7. J. Ma, F. Ji, D.H. Zhang, H.L. Ma, and S.Y. Li Thin Solid Films 357 1999 98
8. S.H. Jeong, and J.H. Boo Thin Solid Films 447-448 2004 105
9. S. Kobayakawa, Y. Tanaka, and A.I. Ektessabi Nucl. Instrum. Meth. Phys. Res. B 249 2006 536
10. Y.P. Zhao, D.X. Ye, G.C. Wang, and T.M. Lu Proc. SPIE 5219 2003 59
11. E.F. Schubert, J.K. Kim, and J.Q. Xi Phys. Stat. Sol. (b) 244 2007 3002
12. C. Buzea, K. Kaminska, G. Beydaghyan, T. Brown, C. Elliott, C. Dean, and K. Robbie J. Vac. Sci. Technol. B 23 2005 2545
13. Y. Zhong, Y.C. Shin, C.M. Kim, B.G. Lee, E.H. Kim, Y.J. Park, K.M.A. Sobahan, C.K. Hwangbo, Y.P. Lee, and T.G. Kim J. Mater. Res. 23 2008 2500
14. K. Prabakar, C.M. Kim, and C.M. Lee Cryst. Res. Technol. 40 2005 1150
15. V. Gupta, and A. Mansingh J. Appl. Phys. 80 1996 1063
16. M.R. Islam, and J. Podder Cryst. Res. Technol. 44 2009 286
17. K. Kaminska, T. Brown, G. Beydaghyan, and K. Robbie Appl. Opt. 42 2003 4212
18. E. Burstein Phys. Rev. 93 1954 632