Optical properties of AlNxOy thin films deposited by DC magnetron sputtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8001, Issue , 2011, Pages

  Borges, J ^a   Alves, E ^b   Vaz, F ^a   Marques, L ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

Aluminium oxynitride; DC reactive magnetron sputtering; optical properties

Indexed keywords

ALN; ALUMINIUM OXIDE; ALUMINIUM OXYNITRIDE; CHEMICAL COMPOSITIONS; CONCENTRATION RATIO; DC MAGNETRON SPUTTERING; DC REACTIVE MAGNETRON SPUTTERING; DISCHARGE PARAMETERS; NON-METALLIC ELEMENTS; OPTICAL RESPONSE;

ALUMINUM; ALUMINUM COMPOUNDS; DEPOSITION; MAGNETRON SPUTTERING; NITRIDES; OPTICAL PROPERTIES; OPTICS; PHOTONICS; THIN FILMS; VAPOR DEPOSITION;

OPTICAL FILMS;

EID: 80052325776     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.892038     Document Type: Conference Paper

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