Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc system

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 14-19

  Zhao, Z W ^a   Tay, B K ^a   Yu, G Q ^a   Chua, D H C ^b   Lau, S P ^a   Cheah, L K ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c Nanofilm Technol Intl PTE Ltd   (Singapore)

Author keywords

Aluminium oxide; FCVA; Optical properties; X Ray photoemission spectroscopy (XPS)

Indexed keywords

ALUMINUM COMPOUNDS; CATHODES; DEPOSITION; MAGNETIC FIELD EFFECTS; OPTICAL COATINGS; OPTICAL PROPERTIES; OXYGEN; PRESSURE EFFECTS; QUARTZ; SILICON; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILTERED CATHODIC VACUUM ARC (FCVA); MAGNETIC FIELD SYSTEMS;

THIN FILMS;

EID: 1342326379     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.047     Document Type: Conference Paper

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