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Volumn 19, Issue 6, 2011, Pages 649-657

Interstitial iron concentrations across multicrystalline silicon wafers via photoluminescence imaging

Author keywords

Interstitial iron distribution; Multicrystalline silicon; Phosphorus gettering; Photoluminescence imaging

Indexed keywords

DIRECTIONALLY SOLIDIFIED; DISLOCATION CLUSTERS; DISSOLVED IRON; GETTERING; GETTERING PROCESS; HIGH RESOLUTION IMAGE; HIGH TEMPERATURE; INGOT COOLING; INJECTION CARRIERS; INTERNAL GETTERING; INTERSTITIAL IRON; LATERAL DISTRIBUTIONS; MULTICRYSTALLINE SILICON; MULTICRYSTALLINE SILICON WAFERS; ON-WAFER; PHOSPHORUS GETTERING; PHOTOLUMINESCENCE IMAGES; PHOTOLUMINESCENCE IMAGING; PL IMAGE;

EID: 80052317542     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.1082     Document Type: Article
Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.