A solid hydraulically amplified piezoelectric microvalve

Journal of Micromechanics and Microengineering

Volumn 21, Issue 9, 2011, Pages

  Wu, Xiaosong ^a   Kim, Seong Hyok ^b   Ji, Chang Hyeon ^c   Allen, Mark G ^d  

^a DOW CHEMICAL COMPANY   (United States)

^b LG Electronics Inc   (South Korea)

^c Ewha Womans University   (South Korea)

^d GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION RATIO; AXIAL DISPLACEMENTS; BLOCKING FORCES; DIFFERENTIAL PRESSURES; DRIVING VOLTAGES; GAS PRESSURES; MICRO VALVES; MICRO-BUBBLE; POLYMER COMPONENTS; SWITCHING SPEED; TACTILE ACTUATORS; TACTILE DISPLAY; VALVE ARRAYS; VALVE DESIGN; VALVE HEADS;

FLOW RATE; HYDRAULICS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; PNEUMATICS;

VALVES (MECHANICAL);

EID: 80052216653     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/9/095003     Document Type: Article

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