Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated micropropulsion

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 80-83

  Yang, Eui Hyeok ^a   Lee, Choonsup ^a   Mueller, Juergen ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW MEASUREMENT; HIGH PRESSURE EFFECTS; LEAKAGE (FLUID); MACHINE DESIGN; MICROACTUATORS; PIEZOELECTRIC DEVICES; SILICON WAFERS; SPACECRAFT EQUIPMENT;

INTEGRATED MICROPROPULSION; LEAK TIGHT PIEZOELECTRIC MICROVALVE; MICROPROPULSION APPLICATIONS; ULTRAHIGH UPSTREAM PRESSURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0038494598     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. J. Mueller, C. Marrese, J. Ziemer, A. Green, E. H. Yang, M. Mojarradi, T. Johnson, V. White, D. Bame, R. Wirz, M. Tajmar, V. Hruby, M. Gamero-Castaño, J. Schein, and R. Reinicke, "JPL Micro-Thrust Propulsion Activities", AIAA Paper 2002-5714, Nanotech 2002, Sept. 9-12, 2002, Houston, TX.
2. J. Mueller, "A Review and Applicability Assessment of MEMS-Based Microvalve Technologies for Microspacecraft Propulsion", Micropropulsion for Small Spacecraft, Vol. 187, edited by Micci, M. and Ketsdever, A., AIAA, Reston, VA, 2000, Chap. 19.
3. Ph. Dubois, B. Guldimann, M.-A. Gretillat, N. F. de Rooij, "Electrostatically Actuated Gas Microvalve Based on a Ta-Si-N Membrane," Proceedings of the 14th IEEE MEMS 2001 Technical Digest, pp. 535-538, 2001.
4. S. Messner, M. Muller, V. Burger, J. Schaible, H. Sandmaier, and R. Zengerle, "A Normally-Closed, Bimetallically Actuated 3-Way Microvalve for Pneumatic Applications," Proceedings of the 11th IEEE MEMS 1998 Technical Digest, Heidelberg, Germany, pp. 40-44, 1998.
5. K. D. Ksrobanek, M. Kohl, and S. Miyazaki, "Stress-Optimized Shape Memory Microvalves," Proceedings of the 10th IEEE MEMS 1997 Technical Digest, pp. 256-261, 1997.
6. P. W. Barth, "Silicon Microvalves for Gas Flow Control," Transducers '95, Stockholm, Sweden, pp. 276-279, 1995.
7. M. J. Zdeblick, R. Anderson, J. Jankowski, B. Kline-Schoder, L. Christel, R. Miles and W. Weber, "Thermopneumatically Actuated Microvalves and Integrated Electro-Fluidic Circuits", IEEE Solid-State Sensor and Actuator Workshop 1994 Technical Digest, Hilton Head Island, South Carolina, USA, pp. 251-255, 1994.
8. M. A. Huff, J. Gilbert, and M. A. Schmidt, "Flow Characteristics of a Pressure-Balanced Microvalve," Transducers '93, Yokohama, Japan, pp. 98-101, 1993.
9. D. Bosch, B. Heimhofer, G. Mucj, H. Seidel, U. Thumser and W. Welser, "A Silicon Microvalve with Combined Electromagnetic/Electrostatic Actuation," Sensors and Actuators A, vol. 37-38, pp. 684-692, 1993.
10. X. Yang, A. Holke, and M. A. Schmidt, "An Electrostatic, On/Off MEMS Valve for Gas Fuel Delivery of a Microengine," Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, USA, June 2-6, pp. 19-22, 2002.