SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 519, Issue 22, 2011, Pages 7650-7658

Multi-scale modelling of silicon nanocrystal synthesis by Low Pressure Chemical Vapor Deposition

(7) Zahi, I a,b,c Mur, P b Blaise, Ph b Esteve A c Rouhani, M Djafari c Vergnes, H a Caussat, B a

a LABORATOIRE DE GÉNIE CHIMIQUE (France)

b CEA LETI (France)

c UNIVERSITÉ DE TOULOUSE (France)

Author keywords

Chemical vapour deposition; Density Functional Theory; Modelling; Multi scale approach; Nanocrystals; Silicon

Indexed keywords

AB INITIO MODELLING; AB INITIO STUDY; AREA DENSITY; AUTOCATALYTIC; CHEMICAL VAPOUR DEPOSITION; DENSITY FUNCTIONALS; DEPOSITION MECHANISM; DESORPTION KINETICS; EXPERIMENTAL DATA; FLUENT CODE; HYDROGEN DESORPTION; INDUSTRIAL REACTORS; KINETIC DATA; LIMITING STEP; MODELLING; MULTI-SCALE APPROACHES; MULTI-SCALE MODELLING; MULTISCALE MODELS; NUCLEATION AND GROWTH; O-H BOND; SILANOLS; SILICON NANOCRYSTALS; SILYLENES; STICKING COEFFICIENTS; SURFACE SITES; THREE STAGES; TRANSIENT CONDITIONS;

CALCULATIONS; CHEMISORPTION; COMPUTATIONAL FLUID DYNAMICS; DENSITY FUNCTIONAL THEORY; DESORPTION; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; NANOCRYSTALS; NUCLEATION; SILICON; SILICON COMPOUNDS; SYNTHESIS (CHEMICAL);

SILICON OXIDES;

EID: 80052130565 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.05.016 Document Type: Article

Times cited : (10)

References (33)

1
- 15844426214
- K. Makihara, H. Deki, H. Murakami, S. Higashi, and S. Miyazaki Appl. Surf. Sci. 244 2005 75
- (2005) Appl. Surf. Sci. , vol.244 , pp. 75
- Makihara, K.¹ Deki, H.² Murakami, H.³ Higashi, S.⁴ Miyazaki, S.⁵

2
- 33750494382
- R.A. Puglisi, S. Lombardo, D. Corso, I. Crupi, G. Nicotra, L. Perniola, B. de Salvo, and C. Gerardi J. Appl. Phys. 100 2006 086104
- (2006) J. Appl. Phys. , vol.100 , pp. 086104
- Puglisi, R.A.¹ Lombardo, S.² Corso, D.³ Crupi, I.⁴ Nicotra, G.⁵ Perniola, L.⁶ De Salvo, B.⁷ Gerardi, C.⁸

3
- 56949099412
- E. Kim, K. Kim, D. Son, J. Kim, S. Won, W.S. Hong, J. Sok, and K. Park Microelectron. Eng. 85 2008 2370
- (2008) Microelectron. Eng. , vol.85 , pp. 2370
- Kim, E.¹ Kim, K.² Son, D.³ Kim, J.⁴ Won, S.⁵ Hong, W.S.⁶ Sok, J.⁷ Park, K.⁸

4
- 77955656414
- B. Gosh, H. Liu, B. Winstead, M.C. Foisy, and S.K. Banerjee Solid State Electron. 54 2010 1295
- (2010) Solid State Electron. , vol.54 , pp. 1295
- Gosh, B.¹ Liu, H.² Winstead, B.³ Foisy, M.C.⁴ Banerjee, S.K.⁵

5
- 39449113971
- V. Cocheteau, P. Mur, T. Billon, E. Scheid, and B. Caussat Appl. Surf. Sci. 254 2008 2927
- (2008) Appl. Surf. Sci. , vol.254 , pp. 2927
- Cocheteau, V.¹ Mur, P.² Billon, T.³ Scheid, E.⁴ Caussat, B.⁵

6
- 0037348957
- F. Mazen, T. Baron, G. Brémond, N. Buffet, N. Rochat, P. Mur, and M.N. Séméria J. Electrochem. Soc. 150 2003 G203
- (2003) J. Electrochem. Soc. , vol.150 , pp. 203
- Mazen, F.¹ Baron, T.² Brémond, G.³ Buffet, N.⁴ Rochat, N.⁵ Mur, P.⁶ Séméria, M.N.⁷

7
- 1542306802
- G. Nicotra, R.A. Puglisi, S. Lombardo, C. Spinella, M. Vulpio, G. Ammendola, M. Bileci, and C. Gerardi J. Appl. Phys. 95 2004 2049
- (2004) J. Appl. Phys. , vol.95 , pp. 2049
- Nicotra, G.¹ Puglisi, R.A.² Lombardo, S.³ Spinella, C.⁴ Vulpio, M.⁵ Ammendola, G.⁶ Bileci, M.⁷ Gerardi, C.⁸

8
- 77957687063
- D. Din, I. Perez-Wurfl, G. Conibeer, and M.A. Green Sol. Energy Mater. Sol. Cells 94 2010 2238
- (2010) Sol. Energy Mater. Sol. Cells , vol.94 , pp. 2238
- Din, D.¹ Perez-Wurfl, I.² Conibeer, G.³ Green, M.A.⁴

9
- 65549118621
- L.V. Mercaldo, P. Delli Veneri, E. Esposito, E. Massera, I. Usatii, and C. Privato Mater. Sci. Eng. B 159-160 2009 74
- (2009) Mater. Sci. Eng. B , vol.159-160 , pp. 74
- Mercaldo, L.V.¹ Delli Veneri, P.² Esposito, E.³ Massera, E.⁴ Usatii, I.⁵ Privato, C.⁶

10
- 0036077829
- W.T. Leach, J. Zhu, and J.G. Ekerdt J. Cryst. Growth 243 2002 30
- (2002) J. Cryst. Growth , vol.243 , pp. 30
- Leach, W.T.¹ Zhu, J.² Ekerdt, J.G.³

11
- 17044394360
- Y. Kajikawa, and S. Noda Appl. Surf. Sci. 245 2004 281
- (2004) Appl. Surf. Sci. , vol.245 , pp. 281
- Kajikawa, Y.¹ Noda, S.²

12
- 0037204362
- G. Nicotra, S. Lomabardo, C. Spinella, G. Ammendola, C. Gerardi, and C. Demuro Appl. Surf. Sci. 205 2003 304
- (2003) Appl. Surf. Sci. , vol.205 , pp. 304
- Nicotra, G.¹ Lomabardo, S.² Spinella, C.³ Ammendola, G.⁴ Gerardi, C.⁵ Demuro, C.⁶

13
- 0024620141
- M.E. Coltrin, R.J. Kee, and G.H. Evans J. Electrochem. Soc. 136 1989 819
- (1989) J. Electrochem. Soc. , vol.136 , pp. 819
- Coltrin, M.E.¹ Kee, R.J.² Evans, G.H.³

14
- 0001622837
- P. Ho, M.E. Coltrin, and W.G. Breiland J. Phys. Chem. 98 1994 10138
- (1994) J. Phys. Chem. , vol.98 , pp. 10138
- Ho, P.¹ Coltrin, M.E.² Breiland, W.G.³

15
- 0026186906
- C.R. Kleijn J. Electrochem. Soc. 138 1991 2190
- (1991) J. Electrochem. Soc. , vol.138 , pp. 2190
- Kleijn, C.R.¹

16
- 0028386611
- Y.B. Wang, F. Teyssandier, J. Simon, and R. Feurer J. Electrochem. Soc. 141 1994 824
- (1994) J. Electrochem. Soc. , vol.141 , pp. 824
- Wang, Y.B.¹ Teyssandier, F.² Simon, J.³ Feurer, R.⁴

17
- 0013114311
- C. Cordier, E. Dehan, E. Scheid, and P. Duverneuil Mater. Sci. Eng. B 37 1996 30
- (1996) Mater. Sci. Eng. B , vol.37 , pp. 30
- Cordier, C.¹ Dehan, E.² Scheid, E.³ Duverneuil, P.⁴

18
- 0004190205
- E.F. Vansant, P. Van der Voort, and K.C. Vrancken Stud. Surf. Sci. Catal. 1995 93
- (1995) Stud. Surf. Sci. Catal. , pp. 93
- Vansant, E.F.¹ Van Der Voort, P.² Vrancken, K.C.³

19
- 0034226828
- S. Miyazaki, Y. Hamamoto, E. Yoshida, M. Ikeda, and M. Hirose Thin Solid Films 369 2000 55
- (2000) Thin Solid Films , vol.369 , pp. 55
- Miyazaki, S.¹ Hamamoto, Y.² Yoshida, E.³ Ikeda, M.⁴ Hirose, M.⁵

20
- 80052131716
- Ph.D thesis INSA, Lyon, France
- F. Mazen, Ph.D thesis INSA, Lyon, France, 2003.
- (2003)
- Mazen, F.¹

21
- 0033752548
- C.R. Kleijn Thin Solid Films 365 2000 294
- (2000) Thin Solid Films , vol.365 , pp. 294
- Kleijn, C.R.¹

22
- 80052104349
- A.M. Rinaldi, S. Carrà, M. Rampoldi, M.C. Martignoni, and M. Masi J. Phys. IV Pr8 1999 189
- (1999) J. Phys. , vol.8 IV PR , pp. 189
- Rinaldi, A.M.¹ Carrà, S.² Rampoldi, M.³ Martignoni, M.C.⁴ Masi, M.⁵

23
- 0037370215
- D. Cai, L.L. Zheng, Y. Wan, A.V. Hariharan, and M. Chandra J. Cryst. Growth 250 2003 41
- (2003) J. Cryst. Growth , vol.250 , pp. 41
- Cai, D.¹ Zheng, L.L.² Wan, Y.³ Hariharan, A.V.⁴ Chandra, M.⁵

24
- 44149124249
- V. Cocheteau, P. Mur, T. Billon, E. Scheid, and B. Caussat Chem. Eng. J. 140 2008 600
- (2008) Chem. Eng. J. , vol.140 , pp. 600
- Cocheteau, V.¹ Mur, P.² Billon, T.³ Scheid, E.⁴ Caussat, B.⁵

25
- 80052132246
- PhD thesis, INP Toulouse, France
- I. Zahi, PhD thesis, INP Toulouse, France (2009).
- (2009)
- Zahi, I.¹

26
- 0022873716
- T.E. Wilke, K.A. Turner, and C.G. Takoudis Chem. Eng. Sci. 41 1986 643
- (1986) Chem. Eng. Sci. , vol.41 , pp. 643
- Wilke, T.E.¹ Turner, K.A.² Takoudis, C.G.³

27
- 34547667453
- I. Zahi, A. Estève, M. Djafari Rouhani, B. Caussat, H. Vergnes, P. Mur, Ph. Blaise, and E. Scheid Surf. Coat. Technol. 201 2007 8854
- (2007) Surf. Coat. Technol. , vol.201 , pp. 8854
- Zahi, I.¹ Estève, A.² Djafari Rouhani, M.³ Caussat, B.⁴ Vergnes, H.⁵ Mur, P.⁶ Blaise, Ph.⁷ Scheid, E.⁸

28
- 0043013159
- J.H. De Boer, M.E. Hermans, and J. Vleeskens Koninkl. Ned. Acad. Wetenschap. B 60 1957 45
- (1957) Koninkl. Ned. Acad. Wetenschap. B , vol.60 , pp. 45
- De Boer, J.H.¹ Hermans, M.E.² Vleeskens, J.³

29
- 33947326070
- J.B. Peri, and A.L. Hensley J. Phys. Chem. 72 1968 2926
- (1968) J. Phys. Chem. , vol.72 , pp. 2926
- Peri, J.B.¹ Hensley, A.L.²

30
- 0034634766
- L.T. Zhuravlev Colloids Surf. A: Physicochem. Eng. Asp. 173 2000 1
- (2000) Colloids Surf. A: Physicochem. Eng. Asp. , vol.173 , pp. 1
- Zhuravlev, L.T.¹

31
- 85065743855
- Wiley International Edition New-York
- R.B. Bird, W.E. Stewart, and E.N. Lightfoot Transp. Phenom. 1960 Wiley International Edition New-York
- (1960) Transp. Phenom.
- Bird, R.B.¹ Stewart, W.E.² Lightfoot, E.N.³

32
- 0002007943
- M.T. Swihart, and S.L. Girshick J. Phys. Chem. B 103 1999 64
- (1999) J. Phys. Chem. B , vol.103 , pp. 64
- Swihart, M.T.¹ Girshick, S.L.²

33
- 2342518240
- C. Cavallotti, A. Barbato, and A. Veneroni J. Cryst. Growth 266 2004 371
- (2004) J. Cryst. Growth , vol.266 , pp. 371
- Cavallotti, C.¹ Barbato, A.² Veneroni, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.