Observation of the nucleation kinetics of Si quantum dots on SiO 2 by energy filtered transmission electron microscopy

Applied Surface Science

Volumn 205, Issue 1-4, 2002, Pages 304-308

  Nicotra, Giuseppe ^a   Lombardo, S ^a   Spinella, C ^a   Ammendola, G ^b   Gerardi, C ^b   Demuro, C ^b  

^a CNR   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

CVD; Energy filtered TEM; Nucleation and growth; Si quantum dots

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NUCLEATION; SEMICONDUCTING SILICON; SILICA; TRANSMISSION ELECTRON MICROSCOPY;

ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0037204362     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01155-8     Document Type: Article

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