High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 91-96

  Hung, Vu Ngoc ^a,b   Abe, Takashi ^a   Minh, Phan Ngoc ^a,c   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

^c INSTITUTE OF MATERIALS SCIENCE   (Viet Nam)

Author keywords

Deep reactive ion etching (RIE); Multichannel; Quartz crystal microbalance (QCM)

Indexed keywords

CRYSTAL RESONATORS; ELECTRIC CONDUCTANCE; INDUCTIVELY COUPLED PLASMA; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; PHOTOLITHOGRAPHY; QUARTZ APPLICATIONS; REACTIVE ION ETCHING;

Q FACTOR; QUARTZ CRYSTAL MICROBALANCE (QCM);

MICROSENSORS;

EID: 0344945464     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00260-7     Document Type: Conference Paper

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