Focused ion beam implantation of Ga in nanocrystalline diamond: Fluence-dependent retention and sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1666-1670

  Gnaser, Hubert ^a   Reuscher, Bernhard ^a   Brodyanski, Alexander ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

Focused ion beams; Nanocrystalline diamond films; Secondary ion mass spectrometry (SIMS)

Indexed keywords

CONCENTRATION (PROCESS); FOCUSED ION BEAMS; ION IMPLANTATION; NANOCRYSTALLINE MATERIALS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

FOCUSED ION BEAM IMPLANTATION; MONTE-CARLO CODES; NANOCRYSTALLINE DIAMOND FILMS; NEAR-SURFACE COMPOSITION;

DIAMOND FILMS;

EID: 43049152783     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.12.080     Document Type: Article

References (37)

1. Orloff J., Utlaut M., and Swanson L. High Resolution Focused Ion Beams: FIB and its Applications (2003), Kluwer Academic, New York
2. In: Giannuzzi L.A., and Stevie F.A. (Eds). Introduction to Focused Ion Beams: Theory, Techniques, and Practice (2005), Springer, Berlin
3. Tseng A.A. Small 1 (2005) 924
4. Volkert C.A., and Minor A.M. MRS Bull. 32 (2007) 389
5. Langford R.M., Nellen P.M., Gierak J., and Fu Y. MRS Bull. 32 (2007) 417
6. Mayer J., Giannuzzi L.A., Kamino T., and Michael J. MRS Bull. 32 (2007) 400
7. Lin J.-F., Bird J.P., Rotkina L., and Bennett P.A. Appl. Phys. Lett. 82 (2003) 802
8. Kubena R.L., Stratton F.P., and Mayer T.M. J. Vac. Sci. Technol. B 6 (1988) 1865
9. Della Ratta A.D., Melngailis J., and Thompson C.V. J. Vac. Sci. Technol. B 11 (1993) 2195
10. Levi-Setti R., Chabala J.M., and Wang Y.L. Ultramicroscopy 24 (1988) 97
11. Levi-Setti R., Gavrilov K.L., and Neilly M.E. Appl. Surf. Sci. 252 (2006) 6765
12. Benninghoven A., Rüdenauer F.G., and Werner H.W. Secondary Ion Mass Spectrometry (1987), Wiley, New York
13. In: Vickerman J.C., and Briggs D. (Eds). ToF-SIMS: Surface Analysis by Mass Spectrometry (2000), IM Publications and Surface Spectra, Chichester, Manchester
14. Kubena R.L., Ward J.W., Stratton F.P., Joyce R.J., and Atkinson G.M. J. Vac. Sci. Technol. B 9 (1991) 3079
15. Orloff J. Rev. Sci. Instr. 64 (1993) 1105
16. MoberlyChan W.J., Adams D.P., Aziz M.J., Hobler G., and Schenkel T. MRS Bull. 32 (2007) 424
17. Yu M.L. In: Behrisch R., and Wittmaack K. (Eds). Sputtering by Particle Bombardment III (1991), Springer, Berlin 91
18. Moore V.J., and Prewett P.D. Vacuum 34 (1984) 189
19. Steckl A.J., Mogul H.C., Novak S.W., and Magee C.W. J. Vac. Sci. Technol. B 9 (1991) 2916
20. Novak S.W., Magee C.W., Mogul H.C., Steckl A.J., and Pawlik M. J. Vac. Sci. Technol. B 10 (1992) 333
21. Gnaser H., Steltmann J., and Oechsner H. Nucl. Instr. Meth. B 80/81 (1993) 110
22. Gnaser H., Kallmayer C., and Oechsner H. J. Vac. Sci. Technol. B 13 (1995) 19
23. Frey L., Lehrer C., and Ryssel H. Appl. Phys. A 76 (2003) 1017
24. Gruen D.M. MRS Bull. 26 (2001) 771
25. Migeon H.N., Le Pipec C., and Le Goux J.J. In: Benninghoven A., Colton R.J., Simons D.S., and Werner H.W. (Eds). Secondary-Ion Mass Spectrometry SIMS V (1986), Springer, Berlin 155
26. Gnaser H. J. Vac. Sci. Technol. A 12 (1994) 452
27. Biersack J.P., Berg S., and Nender C. Nucl. Instr. Meth. B 59/60 (1991) 21
28. Möller W., Eckstein W., and Biersack J.P. Comput. Phys. Commun. 51 (1988) 355
29. Biersack J.P., and Haggmark L.G. Nucl. Instr. Meth. 174 (1980) 257
30. Möller W., and Eckstein W. Nucl. Instr. Meth. B 2 (1984) 814
31. Eckstein W. Computer Simulation of Ion-Solid Interactions (1991), Springer, Berlin
32. Gschneidner K.A. In: Seitz F., and Turnbull D. (Eds). Solid State Physics Vol. 16 (1964), Academic, New York 275
33. Bhattacharyya S., et al. Appl. Phys. Lett. 79 (2001) 1441
34. Eckstein W. Nucl. Instr. Meth. B 171 (2000) 435
35. Lehrer C., Frey L., Petersen S., and Ryssel H. J. Vac. Sci. Technol. B 19 (2001) 2533
36. Huey B.D., and Langford R.M. Nanotechnol. 14 (2003) 409
37. Lugstein A., Basnar B., Smoliner J., and Bertagnolli E. Appl. Phys. A 76 (2003) 545