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Volumn 12, Issue 6, 2006, Pages 1520-1526

Compact electro-optic modulators on a silicon chip

Author keywords

Integrated optics; Optical resonators; Planar waveguides; Silicon on insulator technology

Indexed keywords

ELECTROOPTIC MODULATORS; PLANAR WAVEGUIDES; SILICON CHIPS;

EID: 33845666545     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2006.885341     Document Type: Article
Times cited : (130)

References (42)
  • 1
    • 21844446626 scopus 로고    scopus 로고
    • Intel reveals long-term goals for silicon photonics sensors
    • (Feb. 28) [Online]
    • R. C. Johnson. (2002, Feb. 28). Intel reveals long-term goals for silicon photonics sensors. Electron. Eng. Times [Onlinel. Available: http://www.eetimes.com/semi/news/OEG20020228S0033
    • (2002) Electron. Eng. Times
    • Johnson, R.C.1
  • 2
    • 0034205612 scopus 로고    scopus 로고
    • Photons to the rescue: Microelectronics becomes microphotonics
    • L. C. Kimerling, "Photons to the rescue: Microelectronics becomes microphotonics," Electrochem. Soc. Interface, Summer 2000, vol. 9, no. 2, pp. 28-32.
    • Electrochem. Soc. Interface, Summer 2000 , vol.9 , Issue.2 , pp. 28-32
    • Kimerling, L.C.1
  • 6
    • 0032390206 scopus 로고    scopus 로고
    • Silicon photonics
    • B. Jalali, "Silicon photonics," Proc. SPIE, vol. 3290, pp. 238-45, 1997.
    • (1997) Proc. SPIE , vol.3290 , pp. 238-245
    • Jalali, B.1
  • 9
    • 2942708124 scopus 로고    scopus 로고
    • Losses in single-mode silicon-on-insulator strip waveguides and bends
    • Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express, vol. 12, no. 8, pp. 1622-1631, 2004.
    • (2004) Opt. Express , vol.12 , Issue.8 , pp. 1622-1631
    • Vlasov, Y.A.1    McNab, S.J.2
  • 10
    • 0023576503 scopus 로고
    • Kramers-Kronig analysis of electro-optical switching in silicon
    • R. A. Soref and B. R. Bennett, "Kramers-Kronig analysis of electro-optical switching in silicon," Proc. SPIE, vol. 704, pp. 32-37, 1987.
    • (1987) Proc. SPIE , vol.704 , pp. 32-37
    • Soref, R.A.1    Bennett, B.R.2
  • 12
    • 4544235416 scopus 로고    scopus 로고
    • High-speed, low-voltage modulation in circular WGM microresonators
    • San Diego, CA, Jun. 28-30
    • T. Sadagopan, S. J. Choi, S. J. Choi, P. D. Dapkus, and A. Bond, "High-speed, low-voltage modulation in circular WGM microresonators," presented at the IEEE LEOS Summer Top. Meeting, San Diego, CA, Jun. 28-30, 2004.
    • (2004) IEEE LEOS Summer Top. Meeting
    • Sadagopan, T.1    Choi, S.J.2    Choi, S.J.3    Dapkus, P.D.4    Bond, A.5
  • 14
    • 0029277410 scopus 로고
    • Highly efficient optical phase modulator in SOI waveguides
    • C. K. Tang and G. T. Reed, "Highly efficient optical phase modulator in SOI waveguides," Electron. Lett., vol. 31, no. 6, pp. 451-452, 1995.
    • (1995) Electron. Lett. , vol.31 , Issue.6 , pp. 451-452
    • Tang, C.K.1    Reed, G.T.2
  • 15
    • 0031104368 scopus 로고    scopus 로고
    • Silicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide
    • Mar.
    • A. Cutolo, M. Iodice, P. Spirito, and L. Zeni, "Silicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide," J. Lightw. Technol., vol. 15, no. 3, pp. 505-518, Mar. 1997.
    • (1997) J. Lightw. Technol. , vol.15 , Issue.3 , pp. 505-518
    • Cutolo, A.1    Iodice, M.2    Spirito, P.3    Zeni, L.4
  • 16
    • 0037261564 scopus 로고    scopus 로고
    • Design, fabrication, and testing of an integrated Si-based light modulator
    • Jan.
    • A. Sciuto, S. Libertino, A. Alessandria, S. Coffa, and G. Coppola, "Design, fabrication, and testing of an integrated Si-based light modulator," J. Lightw. Technol., vol. 21, no. 1, pp. 228-235, Jan. 2003.
    • (2003) J. Lightw. Technol. , vol.21 , Issue.1 , pp. 228-235
    • Sciuto, A.1    Libertino, S.2    Alessandria, A.3    Coffa, S.4    Coppola, G.5
  • 18
    • 6344247882 scopus 로고    scopus 로고
    • All-optical control of light on a silicon chip
    • V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All-optical control of light on a silicon chip," Nature, vol. 431, no. 7012, pp. 1081-1084, 2004.
    • (2004) Nature , vol.431 , Issue.7012 , pp. 1081-1084
    • Almeida, V.R.1    Barrios, C.A.2    Panepucci, R.R.3    Lipson, M.4
  • 19
    • 0042329202 scopus 로고    scopus 로고
    • Scaling down photonic waveguide devices on the SOI platform
    • P. Cheben, D. -X. Xu, S. Janz, and A. Delage, "Scaling down photonic waveguide devices on the SOI platform," Proc. SPIE, vol. 5117, pp. 147-156, 2003.
    • (2003) Proc. SPIE , vol.5117 , pp. 147-156
    • Cheben, P.1    Xu, D.X.2    Janz, S.3    Delage, A.4
  • 20
    • 0141955116 scopus 로고    scopus 로고
    • Temperature stability for silicon-based photonic band-gap structures
    • S. M. Weiss, M. Molinari, and P. M. Fauchet, "Temperature stability for silicon-based photonic band-gap structures," Appl. Phys. Lett., vol. 83, no. 10, pp. 1980-1982, 2003.
    • (2003) Appl. Phys. Lett. , vol.83 , Issue.10 , pp. 1980-1982
    • Weiss, S.M.1    Molinari, M.2    Fauchet, P.M.3
  • 21
    • 0030258662 scopus 로고    scopus 로고
    • Zero-gap directional coupler switch integrated into a silicon-on-insulator for 1.3-μm operation
    • C. Z. Zhao, E. K. Liu, G. Z. Li, Y. Gao, and C. S. Guo, "Zero-gap directional coupler switch integrated into a silicon-on-insulator for 1.3-μm operation," Opt. Lett., vol. 21, no. 20, p. 1664, 1996.
    • (1996) Opt. Lett. , vol.21 , Issue.20 , pp. 1664
    • Zhao, C.Z.1    Liu, E.K.2    Li, G.Z.3    Gao, Y.4    Guo, C.S.5
  • 22
    • 0142165122 scopus 로고    scopus 로고
    • Electro-optic modulation of silicon-on-insulator submicrometer-size waveguide devices
    • Oct.
    • C. A. Barrios, V. R. Almeida, and M. Lipson, "Electro-optic modulation of silicon-on-insulator submicrometer-size waveguide devices," J. Lightw. Technol., vol. 21, no. 10, pp. 2332-2339, Oct. 2003.
    • (2003) J. Lightw. Technol. , vol.21 , Issue.10 , pp. 2332-2339
    • Barrios, C.A.1    Almeida, V.R.2    Lipson, M.3
  • 23
    • 0000479397 scopus 로고
    • Simulation studies of silicon electro-optic waveguide devices
    • S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, "Simulation studies of silicon electro-optic waveguide devices," J. Appl. Phys., vol. 68, pp. 4964-4970, 1990.
    • (1990) J. Appl. Phys. , vol.68 , pp. 4964-4970
    • Giguere, S.R.1    Friedman, L.2    Soref, R.A.3    Lorenzo, J.P.4
  • 24
    • 0028387829 scopus 로고
    • All-silicon Fabry-Perot modulator based on the thermo-optic effect
    • G. Cocorullo, M. Iodice, and I. Rendina, "All-silicon Fabry-Perot modulator based on the thermo-optic effect," Opt. Lett., vol. 19, no. 6, p. 420, 1994.
    • (1994) Opt. Lett. , vol.19 , Issue.6 , pp. 420
    • Cocorullo, G.1    Iodice, M.2    Rendina, I.3
  • 25
    • 0026124072 scopus 로고
    • Fabry-Perot optical intensity modulator at 1.3 μm in silicon
    • Mar.
    • X. Xiao, J. C. Sturm, K. K. Goel, and P. V. Schwartz, "Fabry-Perot optical intensity modulator at 1.3 μm in silicon," IEEE Photon. Technol. Lett., vol. 3, no. 3, pp. 230-231, Mar. 1991.
    • (1991) IEEE Photon. Technol. Lett. , vol.3 , Issue.3 , pp. 230-231
    • Xiao, X.1    Sturm, J.C.2    Goel, K.K.3    Schwartz, P.V.4
  • 26
    • 0028274336 scopus 로고
    • Silicon 1 × 2 digital optical switch using plasma dispersion
    • Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, "Silicon 1 × 2 digital optical switch using plasma dispersion," Electron. Lett., vol. 30, no. 2, p. 130, 1994.
    • (1994) Electron. Lett. , vol.30 , Issue.2 , pp. 130
    • Liu, Y.L.1    Liu, E.K.2    Zhang, S.L.3    Li, G.Z.4    Luo, J.S.5
  • 28
    • 0029390504 scopus 로고
    • Silicon on insulator Mach-Zehnder waveguide interferometers operating at 1.3 μm
    • C. Z. Zhao, G. Z. Li, E. K. Liu, Y. Gao, and X. D. Liu, "Silicon on insulator Mach-Zehnder waveguide interferometers operating at 1.3 μm," Appl. Phys. Lett., vol. 67, pp. 2448-2449, 1995.
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 2448-2449
    • Zhao, C.Z.1    Li, G.Z.2    Liu, E.K.3    Gao, Y.4    Liu, X.D.5
  • 29
    • 0030574531 scopus 로고
    • High-modulation-depth and short-cavity-length silicon Fabry-Perot modulator with two grating Bragg reflectors
    • M. Y. Liu and S. Chou, "High-modulation-depth and short-cavity-length silicon Fabry-Perot modulator with two grating Bragg reflectors," Appl. Phys. Lett., vol. 68, pp. 170-172, 1995.
    • (1995) Appl. Phys. Lett. , vol.68 , pp. 170-172
    • Liu, M.Y.1    Chou, S.2
  • 30
    • 0030258662 scopus 로고    scopus 로고
    • Zero-gap directional coupler switch integrated into a silicon-on-insulator for 1.3-μm operation
    • C. Z. Zhao, E. K. Liu, G. Z. Li, Y. Gao, and C. S. Guo, "Zero-gap directional coupler switch integrated into a silicon-on-insulator for 1.3-μm operation," Opt. Lett., vol. 21, no. 20, p. 1664, 1996.
    • (1996) Opt. Lett. , vol.21 , Issue.20 , pp. 1664
    • Zhao, C.Z.1    Liu, E.K.2    Li, G.Z.3    Gao, Y.4    Guo, C.S.5
  • 31
    • 0031188130 scopus 로고    scopus 로고
    • An electrically controlled Bragg reflector integrated in a rib silicon on insulator waveguide
    • A. Cutolo, M. Iodice, A. Irace, P. Spirito, and L. Zeni, "An electrically controlled Bragg reflector integrated in a rib silicon on insulator waveguide," Appl. Phys. Lett., vol. 71, pp. 199-201, 1997.
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 199-201
    • Cutolo, A.1    Iodice, M.2    Irace, A.3    Spirito, P.4    Zeni, L.5
  • 32
    • 0031104368 scopus 로고    scopus 로고
    • Silicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide
    • Mar.
    • _, "Silicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide," J. Lightw. Technol., vol. 15, no. 3, pp. 505-518, Mar. 1997.
    • (1997) J. Lightw. Technol. , vol.15 , Issue.3 , pp. 505-518
  • 33
    • 0031212931 scopus 로고    scopus 로고
    • Silicon-on-insulator asymmetric optical switch based on total internal reflection
    • Aug.
    • C. Z. Zhao, A. H. Chen, E. K. Liu, and G. Z. Li, "Silicon-on- insulator asymmetric optical switch based on total internal reflection," IEEE Photon. Technol. Lett., vol. 9, no. 8, pp. 1113-1115, Aug. 1997.
    • (1997) IEEE Photon. Technol. Lett. , vol.9 , Issue.8 , pp. 1113-1115
    • Zhao, C.Z.1    Chen, A.H.2    Liu, E.K.3    Li, G.Z.4
  • 34
    • 0035359118 scopus 로고    scopus 로고
    • Simulation and analysis of a high-efficiency silicon optoelectronic modulator based on a Bragg mirror
    • G. Coppola, A. Irace, M. Iodice, and A. Cutolo, "Simulation and analysis of a high-efficiency silicon optoelectronic modulator based on a Bragg mirror," Opt. Eng., vol. 40, pp. 1076-1081, 2001.
    • (2001) Opt. Eng. , vol.40 , pp. 1076-1081
    • Coppola, G.1    Irace, A.2    Iodice, M.3    Cutolo, A.4
  • 35
    • 0037261564 scopus 로고    scopus 로고
    • Design, fabrication, and testing of an integrated Si-based light modulator
    • Jan.
    • A. Sciuto, S. Libertino, A. Alessandria, S. Coffa, and G. Coppola, "Design, fabrication, and testing of an integrated Si-based light modulator," J. Lightw. Technol., vol. 21, no. 1, pp. 228-235, Jan. 2003.
    • (2003) J. Lightw. Technol. , vol.21 , Issue.1 , pp. 228-235
    • Sciuto, A.1    Libertino, S.2    Alessandria, A.3    Coffa, S.4    Coppola, G.5
  • 36
    • 0029277410 scopus 로고
    • Highly efficient optical phase modulator in SOI waveguides
    • C. K. Tang and G. T. Reed, "Highly efficient optical phase modulator in SOI waveguides," Electron. Lett., vol. 31, pp. 451-452, 1995.
    • (1995) Electron. Lett. , vol.31 , pp. 451-452
    • Tang, C.K.1    Reed, G.T.2
  • 37
    • 19744378261 scopus 로고    scopus 로고
    • Micrometer-scale silicon electro-optic modulator
    • Q. Xu, B. Schmidt, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature, vol. 435, no. 7040, pp. 325-327, 2005.
    • (2005) Nature , vol.435 , Issue.7040 , pp. 325-327
    • Xu, Q.1    Schmidt, B.2    Lipson, M.3
  • 39
    • 0041742289 scopus 로고    scopus 로고
    • Nanotaper for compact mode conversion
    • V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett., vol. 28, pp. 1302-1304, 2003.
    • (2003) Opt. Lett. , vol.28 , pp. 1302-1304
    • Almeida, V.R.1    Panepucci, R.R.2    Lipson, M.3
  • 40
    • 0041980155 scopus 로고
    • Thin silicon film p-i-n photodiodes with internal reflection
    • Feb.
    • J. Muller, "Thin silicon film p-i-n photodiodes with internal reflection," IEEE Trans. Electron. Devices, vol. ED-25, no. 2, pp. 247-253, Feb. 1978.
    • (1978) IEEE Trans. Electron. Devices , vol.ED-25 , Issue.2 , pp. 247-253
    • Muller, J.1
  • 41
    • 27844553386 scopus 로고    scopus 로고
    • Ultrafast all-optical modulation on a silicon chip
    • S. F. Preble, Q. Xu, B. S. Schmidt, and M. Lipson, "Ultrafast all-optical modulation on a silicon chip," Opt. Lett., vol. 30, no. 21, pp. 2891-2893, 2005.
    • (2005) Opt. Lett. , vol.30 , Issue.21 , pp. 2891-2893
    • Preble, S.F.1    Xu, Q.2    Schmidt, B.S.3    Lipson, M.4
  • 42
    • 33644998625 scopus 로고    scopus 로고
    • All-optical silicon modulators based on carrier injection by two-photon absorption
    • Mar.
    • C. Manolatou and M. Lipson, "All-optical silicon modulators based on carrier injection by two-photon absorption," J. Lightw. Technol., vol. 24, no. 3, pp. 1433-1439, Mar. 2006.
    • (2006) J. Lightw. Technol. , vol.24 , Issue.3 , pp. 1433-1439
    • Manolatou, C.1    Lipson, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.