Angle resolved velocity distributions of sputtered medium Z atoms

Journal of Nuclear Materials

Volumn 241-243, Issue , 1997, Pages 1160-1163

  Goehlich, A ^a   Niemoeller, N ^a   Doebele, H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; IMPURITIES; LASER BEAMS; SPUTTERING; TITANIUM; VELOCITY;

ANGLE RESOLVED VELOCITY DISTRIBUTIONS; EMISSION ANGLES; LASER DOPPLER SHIFT METHOD; PHYSICAL EROSION;

ATOMS;

EID: 18344406715     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(96)00692-7     Document Type: Article

References (7)