Angle resolved velocity distributions of sputtered aluminum atoms

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 115, Issue 1-4, 1996, Pages 489-492

  Goehlich, A ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMS; DOPPLER EFFECT; DYE LASERS; FLUORESCENCE; LASER BEAM EFFECTS; PARTICLE OPTICS; PHOTONS; PULSED LASER APPLICATIONS; SPUTTERING; TARGETS;

LASER DOPPLER SHIFT METHOD; PULSED DYE LASER RADIATION; SPUTTERED ALUMINUM ATOMS;

ION BOMBARDMENT;

EID: 0030564317     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01448-9     Document Type: Article

References (9)

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9. H.H. Andersen and H.L. Bay, in: Sputtering by Particle Bombardment, Vol. 1, ed. R. Behrisch (Springer, Berlin, 1981).