On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron discharge

EPL

Volumn 82, Issue 1, 2008, Pages

  Poucques, L De ^a   Vitelaru, C ^a,b   Minea, T M ^a   Bretagne, J ^a   Popa, G ^b  

^a UNIVERSITÉ PARIS SUD   (France)

^b ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

Author keywords

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Indexed keywords

EID: 79051470524     PISSN: 02955075     EISSN: 12864854     Source Type: Journal    
DOI: 10.1209/0295-5075/82/15002     Document Type: Article

References (11)