Anisotropic energies of sputtered atoms under oblique ion incidence

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 215, Issue 3-4, 2004, Pages 357-365

  Stepanova, M ^a   Dew, S K ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Ion beam impact on surfaces; Kinetic theory; Sputtering

Indexed keywords

ANISOTROPY; APPROXIMATION THEORY; ENERGY TRANSFER; FILM GROWTH; INTERFACIAL ENERGY; ION BEAMS; ION BOMBARDMENT; KINETIC THEORY; SPUTTERING; THIN FILMS;

ION BEAM IMPACT ON SURFACES; IONS CURRENT; THERMALIZATION CONDITIONS;

ATOMIC PHYSICS;

EID: 0942289570     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.09.013     Document Type: Article

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