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Journal of Applied Physics

Volumn 108, Issue 3, 2010, Pages

Experiments and global model of inductively coupled rf Ar/N2 discharges

(2) Kimura, Takashi a Kasugai, Hiroki a

a NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DENSITIES; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON ENERGY PROBABILITY FUNCTIONS; ELECTROPOSITIVE PLASMAS; EXPONENTIALS; GLOBAL MODELS; HIGH ENERGY REGIONS; INDUCTIVELY-COUPLED; MODEL RESULTS; NITROGEN ATOM; PLASMA CHEMISTRIES; ROTATIONAL TEMPERATURE; TOTAL PRESSURE; TWO-TEMPERATURE; VIBRATIONAL TEMPERATURE;

DISSOCIATION; ELECTRIC DISCHARGES; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY LEVELS; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; EXPERIMENTS; EXPONENTIAL FUNCTIONS; OPTICAL EMISSION SPECTROSCOPY;

ARGON;

EID: 77955909222 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3468603 Document Type: Article

Times cited : (58)

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