Modeling and experimental study of pulse modulated ICP discharge: Production of Ar highly excited states

Plasma Sources Science and Technology

Volumn 20, Issue 3, 2011, Pages

  Kang, Namjun ^a,b   Gaboriau, Freddy ^a,b   Oh, Soo Ghee ^c   Ricard, André ^a,b  

^a Laboratoire Plasma et Conversion d'Energie   (France)

^b CNRS   (France)

^c Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DENSITIES; ELECTRON-ION RECOMBINATIONS; EXPERIMENTAL STUDIES; GLOBAL MODELS; HIGHLY EXCITED STATE; INTENSE EMISSION; LOW PRESSURES; OPTICAL ABSORPTION AND EMISSION SPECTROSCOPY; POWER BALANCE EQUATIONS; THREE BODY; TIME EVOLUTIONS; TIME-DEPENDENT; TIME-RESOLVED;

ABSORPTION SPECTROSCOPY; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; OPTICAL EMISSION SPECTROSCOPY;

EXCITED STATES;

EID: 79957720780     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/3/035002     Document Type: Article

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