Fabrication of silicon nanowire for detecting β-amyloid (1-42) by nanoimprint lithography

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 5, 2011, Pages 4517-4521

  Choi, Dong Sik ^a   Lee, Jin Ho ^a   Jung, Hee Soo ^b   Jung, Gun Young ^b   Choi, Jae Hak ^c   Choi, Jeong Woo ^a   Oh, Byung Keun ^a  

^a Sogang University   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

^c Korea Atomic Energy Research Institute   (South Korea)

Author keywords

Nanobiosensor; Nanoimprint lithography; Silicon nanowire pattern; Silicon on insulator (SOI)

Indexed keywords

NANO-IMPRINT; NANOBIOSENSOR; NANOWIRE DEVICES; NEXT GENERATION LITHOGRAPHY; NM RESOLUTION; PATTERNING TECHNIQUES; SEMICONDUCTOR PARAMETERS; SILICON NANOWIRE DEVICE; SILICON NANOWIRES; SILICON ON INSULATOR WAFERS; SILICON-ON-INSULATOR (SOI); TIME CHARACTERISTICS; ULTRAVIOLET-NANOIMPRINT LITHOGRAPHY;

ELECTRIC PROPERTIES; FABRICATION; GLYCOPROTEINS; MONOCLONAL ANTIBODIES; NANOIMPRINT LITHOGRAPHY; NANOWIRES; PROTEINS;

SILICON WAFERS;

AMYLOID BETA PROTEIN; AMYLOID BETA PROTEIN (1 42); AMYLOID BETA-PROTEIN (1-42); NANOWIRE; PEPTIDE FRAGMENT; SILICON;

ARTICLE; CHEMISTRY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR;

AMYLOID BETA-PEPTIDES; MICROSCOPY, ELECTRON, SCANNING; NANOWIRES; PEPTIDE FRAGMENTS; SEMICONDUCTORS; SILICON;

EID: 80051598387     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.3634     Document Type: Conference Paper

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