The characteristics of the multi-hole RF capacitively coupled plasma discharged with neon, argon and krypton

Thin Solid Films

Volumn 519, Issue 20, 2011, Pages 6955-6959

  Lee, H S ^a   Lee, Y S ^b   Seo, S H ^b   Chang, H Y ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Hole diameter; Hollow cathode; Multi hole electrode; Plasma density

Indexed keywords

ELECTRODE HOLES; GAS PLASMA; HIGH DENSITY; HOLE DIAMETER; HOLLOW CATHODES; MULTI-HOLE ELECTRODE; RF CAPACITIVELY COUPLED PLASMA;

ARGON; INDUCTIVELY COUPLED PLASMA; KRYPTON; NEON; PLASMA DENSITY; PLASMA JETS;

ELECTRIC DISCHARGES;

EID: 80051546722     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.139     Document Type: Conference Paper

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