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Applied Physics Letters

Volumn 97, Issue 8, 2010, Pages

Effective design of multiple hollow cathode electrode to enhance the density of rf capacitively coupled plasma

(4) Lee, H S a Lee, Y S a Seo, S H a Chang, H Y a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTIC DESIGN; BULK PLASMA; GAS SPECIES; HIGH DENSITY PLASMAS; HIGH-DENSITY; HOLE DIAMETER; HOLLOW CATHODES; OPTIMUM CONDITIONS; RF CAPACITIVELY COUPLED PLASMA; RF CURRENTS; SHEATH REGIONS;

INDUCTIVELY COUPLED PLASMA; IONIZATION OF GASES; PERMITTIVITY; PLASMA DENSITY;

ELECTRIC DISCHARGES;

EID: 77956222230 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3480409 Document Type: Article

Times cited : (33)

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