Development of a PZT MEMS switch architecture for low-power digital applications

Journal of Microelectromechanical Systems

Volumn 20, Issue 4, 2011, Pages 1032-1042

  Proie, Robert M ^a,b   Polcawich, Ronald G ^b   Pulskamp, Jeffrey S ^b   Ivanov, Tony ^b   Zaghloul, Mona E ^a  

^a The George Washington University   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Actuators; digital circuits; lead zirconate titanate (PZT) ceramics; piezoelectric devices

Indexed keywords

ACTUATION VOLTAGES; CONTACT MATERIAL; CONTACT METALLURGY; CONTROL HARDWARES; DESIGN VARIABLES; DEVICE PERFORMANCE; DEVICE WAFERS; DIGITAL APPLICATIONS; DIGITAL SWITCH; DYNAMIC POWER; ENERGY EFFICIENT; HIGH ENERGY RADIATION; LEAD ZIRCONATE TITANATE; LEAD ZIRCONATE TITANATE CERAMICS; LOW FREQUENCY; LOW POWER; MEMS PLATFORM; MEMS SWITCHES; OPTIMAL SWITCH; PROBE STATIONS; PROPAGATION DELAYS; PZT; SEMI-AUTOMATED; SOFTWARE MODEL; STATIC POWER CONSUMPTION; VOLTAGE BIAS; VOLTAGE SYSTEMS;

COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; COMPUTER SOFTWARE; ENERGY EFFICIENCY; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING LEAD COMPOUNDS;

DIGITAL CIRCUITS;

EID: 79961208738     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2148160     Document Type: Article

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