Low voltage complementary MEMS logic using piezoelectric actuators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 328-331

  Judy, Daniel C ^a   Polcawich, Ronald G ^a   Pulskamp, Jeffery S ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; COMPUTER CIRCUITS; ELECTROMECHANICAL DEVICES; II-VI SEMICONDUCTORS; LEAD ZIRCONATE TITANATE; MEMS; MICROSYSTEMS; OXIDE FILMS; PIEZOELECTRICITY; SOLID-STATE SENSORS; THIN FILMS; ZINC OXIDE;

EMBEDDED CONTROL; LOW VOLTAGES; MEMS SWITCHES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC THIN FILMS; SENSORS AND ACTUATORS;

PIEZOELECTRIC ACTUATORS;

EID: 84860447729     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.85     Document Type: Conference Paper

References (8)

1. P. Muralt, IEEE Trans. UFFC, vol. 47, pp 903-915, 2000.
2. K. Prume, et al., IEEE Trans. UFFC, vol. 54, pp. 8 – 14, 2007.
3. S.-W. Lee, R. W. Johnstone, and A. M. Parameswaran, IEEE CCECE/CCGEI, Saskatoon, May 2005, pp. 1513 – 1516.
4. S.-W. Lee, R. W. Johnstone, and A. M. Parameswaran, Proc. SPIE, 6037, pp. 1A1-1A10, 2005.
5. R. Polcawich, et al., IEEE Trans. Microw. Theory Techn., vol 55, pp. 2642 – 2654, 2007.
6. R. Polcawich, et al., IEEE Proc. Internat. Microw. Symp., pp. 2083 – 2086, 2007.
7. H. Chandrahalim, et al., submitted to Proc. Solid-State Sensor Actutor Workshop, 2008.
8. K. Oldham, et al., Integ. Ferro., vol. 95, pp. 54-65, 2007.