Highly transparent sapphire micro-grating structures with large diffuse light scattering

Optics Express

Volumn 19, Issue 16, 2011, Pages 15574-15583

  Ko, Yeong Hwan ^a   Yu, Jae Su ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FINITE DIFFERENCE TIME DOMAIN METHOD; LIGHT SCATTERING; PLASMA ETCHING; REFRACTION; REFRACTIVE INDEX; SCATTERING; SILICON COMPOUNDS; TIME DOMAIN ANALYSIS;

CONVENTIONAL LITHOGRAPHY; DRY ETCHING PROCESS; EXPERIMENTAL DATA; FINITE DIFFERENCE TIME DOMAIN SIMULATIONS; GRADED REFRACTIVE INDICES; GRATING STRUCTURES; INDEX MATERIAL; PITCH LENGTH; RIGOROUS COUPLED WAVE ANALYSIS; SAPPHIRE SUBSTRATES; THEORETICAL CALCULATIONS; THEORETICAL RESULT; TRANSPARENT PROPERTIES; WAVELENGTH RANGES;

SAPPHIRE;

ALUMINUM OXIDE; SILICON DIOXIDE;

ALGORITHM; ARTICLE; CHEMISTRY; COMPUTER SIMULATION; ELECTRICITY; LIGHT; MATERIALS TESTING; METHODOLOGY; OPTICS; PHOTON; RADIATION SCATTERING; REFRACTOMETRY; THEORETICAL MODEL;

ALGORITHMS; ALUMINUM OXIDE; COMPUTER SIMULATION; ELECTRICITY; LIGHT; MATERIALS TESTING; MODELS, THEORETICAL; OPTICS AND PHOTONICS; PHOTONS; REFRACTOMETRY; SCATTERING, RADIATION; SILICON DIOXIDE;

EID: 79961036999     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.015574     Document Type: Article

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